Inventor · disambiguated record
Andreas Tillmann
Also filed as: TILLMANN ANDREAS
7 granted patents·158 citations·filing 1995–2023
85Inventor score
Files withALANTUM EUROPE GMBH3AST ELEKRONIK1AST ELEKRONIK GMBH1MATTSON TECH INC1STEAG RTP SYSTEMS GMBH1
Top patents by PatentIndex Score
7 records- 0184US5628564AMethod and apparatus for wavevector selective pyrometry in rapid thermal processing systemsAST ELEKRONIK GMBH·Filed 1995·Granted May 13, 1997·98 cites·21 claims
- 0282US11883811B2Catalyst material and method of manufacturing the sameALANTUM EUROPE GMBH·Filed 2019·Granted Jan 30, 2024·2 cites·13 claims
- 0381US12285748B2Catalyst material and method of manufacturing the sameALANTUM EUROPE GMBH·Filed 2023·Granted Apr 29, 2025·0 cites·12 claims
- 0476US11660582B2Method for producing a pellet, pellet, catalyst charge, and static mixerALANTUM EUROPE GMBH·Filed 2018·Granted May 30, 2023·2 cites·8 claims
- 0575US7037797B1Localized heating and cooling of substratesMATTSON TECH INC·Filed 2000·Granted May 2, 2006·27 cites·33 claims
- 0658US5580830AModified reaction chamber and improved gas flushing method in rapid thermal processing apparatusAST ELEKRONIK·Filed 1995·Granted Dec 3, 1996·24 cites·23 claims
- 0751US7041610B1Method and apparatus for the thermal treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 2000·Granted May 9, 2006·5 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →