Inventor · disambiguated record
Anand Vasudev
Also filed as: VASUDEV ANAND
5 granted patents·1 pending application·222 citations·filing 1997–2023
84Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0190US6125859AMethod for improved cleaning of substrate processing systemsAPPLIED MATERIALS INC·Filed 1997·Granted Oct 3, 2000·131 cites·25 claims
- 0286US8183132B2Methods for fabricating group III nitride structures with a cluster toolNIJHAWAN SANDEEP·Filed 2010·Granted May 22, 2012·12 cites·23 claims
- 0374US6242347B1Method for cleaning a process chamberAPPLIED MATERIALS INC·Filed 1998·Granted Jun 5, 2001·39 cites·25 claims
- 0466US8075789B1Remote plasma cleaning source having reduced reactivity with a substrate processing chamberLITTAU KARL A·Filed 1997·Granted Dec 13, 2011·36 cites·5 claims
- 0557US2025220777A1Method and Apparatus of Substrate Support Repair and RefurbishmentAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0652US6482746B2Computer readable medium for controlling a method of cleaning a process chamberAPPLIED MATERIALS INC·Filed 2001·Granted Nov 19, 2002·4 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →