Inventor · disambiguated record

Aravind Alwan

Also filed as: ALWAN ARAVIND

3 granted patents·3 citations·filing 2018–2023

55Inventor score

Technology areasH10P

Files withLAM RES CORP3

Top patents by PatentIndex Score

3 records

0179US11798789B2Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering featuresLAM RES CORP·Filed 2018·Granted Oct 24, 2023·3 cites·41 claims
0275US12500068B2Edge rings providing kinematic coupling and corresponding substrate processing systemsLAM RES CORP·Filed 2023·Granted Dec 16, 2025·0 cites·51 claims
0348US12168301B2Fixture for automatic calibration of substrate transfer robotLAM RES CORP·Filed 2020·Granted Dec 17, 2024·0 cites·21 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →