Inventor · disambiguated record
Arunima Deya Balan
Also filed as: BALAN ARUNIMA DEYA
1 granted patent·3 pending applications·0 citations·filing 2021–2023
6Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0154US2025218774A1High energy atomic layer etch of a carbon containing layerLAM RES CORP·Filed 2023·Application pending·0 cites
- 0254US2025210363A1Fast atomic layer etchLAM RES CORP·Filed 2023·Application pending·0 cites
- 0350US2025243585A1Co-deposition and etch processLAM RES CORP·Filed 2023·Application pending·0 cites
- 0448US12341021B2Selective etch using deposition of a metalloid or metal containing hardmaskLAM RES CORP·Filed 2021·Granted Jun 24, 2025·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →