Inventor · disambiguated record
Arjan Johannes Anton Beukman
Also filed as: BEUKMAN ARJAN JOHANNES ANTON
6 granted patents·2 pending applications·4 citations·filing 2019–2023
70Inventor score
Files withASML NETHERLANDS BV8
Top patents by PatentIndex Score
8 records- 0190US11906906B2Metrology method and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2021·Granted Feb 20, 2024·2 cites·19 claims
- 0284US12298257B2Monolithic particle inspection deviceASML NETHERLANDS BV·Filed 2021·Granted May 13, 2025·1 cites·13 claims
- 0381US12393046B2Metrology systems, coherence scrambler illumination sources and methods thereofASML NETHERLANDS BV·Filed 2020·Granted Aug 19, 2025·1 cites·15 claims
- 0467US12287591B2Lithographic apparatus, metrology systems, and methods thereofASML NETHERLANDS BV·Filed 2021·Granted Apr 29, 2025·0 cites·20 claims
- 0564US12326669B2Illumination apparatus and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2023·Granted Jun 10, 2025·0 cites·19 claims
- 0661US11428925B2Position metrology apparatus and associated optical elementsASML NETHERLANDS BV·Filed 2019·Granted Aug 30, 2022·0 cites·3 claims
- 0756US2025341787A1Configurable printed optical routing for parallel optical detectionASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0853US2024241452A1Metrology apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →