Inventor · disambiguated record
Arthur Y. Chen
Also filed as: CHEN ARTHUR · CHEN ARTHUR Y
5 granted patents·1,614 citations·filing 1997–2000
89Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0198US6699399B1Self-cleaning etch processAPPLIED MATERIALS INC·Filed 2000·Granted Mar 2, 2004·500 cites·72 claims
- 0298US6379575B1Treatment of etching chambers using activated cleaning gasAPPLIED MATERIALS INC·Filed 1997·Granted Apr 30, 2002·375 cites·47 claims
- 0396US6352049B1Plasma assisted processing chamber with separate control of species densityAPPLIED MATERIALS INC·Filed 1998·Granted Mar 5, 2002·498 cites·24 claims
- 0494US6136211ASelf-cleaning etch processAPPLIED MATERIALS INC·Filed 1997·Granted Oct 24, 2000·160 cites·43 claims
- 0583US6872322B1Multiple stage process for cleaning process chambersAPPLIED MATERIALS INC·Filed 1999·Granted Mar 29, 2005·81 cites·40 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →