Inventor · disambiguated record
Arthur M. Howald
Also filed as: HOWALD ARTHUR · HOWALD ARTHUR M
53 granted patents·5 pending applications·1,883 citations·filing 1978–2024
99Inventor score
Top patents by PatentIndex Score
58 records- 0199US7611640B1Minimizing arcing in a plasma processing chamberLAM RES CORP·Filed 2006·Granted Nov 3, 2009·365 cites·33 claims
- 0299US7086347B2Apparatus and methods for minimizing arcing in a plasma processing chamberLAM RES CORP·Filed 2002·Granted Aug 8, 2006·380 cites·31 claims
- 0397US12322572B2Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHz RF generatorLAM RES CORP·Filed 2024·Granted Jun 3, 2025·2 cites·32 claims
- 0497US10469108B2Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generatorLAM RES CORP·Filed 2016·Granted Nov 5, 2019·35 cites·18 claims
- 0597US9779196B2Segmenting a model within a plasma systemLAM RES CORP·Filed 2014·Granted Oct 3, 2017·35 cites·25 claims
- 0697US7480571B2Apparatus and methods for improving the stability of RF power delivery to a plasma loadLAM RES CORP·Filed 2004·Granted Jan 20, 2009·84 cites·20 claims
- 0797US6876155B2Plasma processor apparatus and method, and antennaLAM RES CORP·Filed 2002·Granted Apr 5, 2005·68 cites·48 claims
- 0897US6259334B1Methods for controlling an RF matching networkLAM RES CORP·Filed 1998·Granted Jul 10, 2001·137 cites·20 claims
- 0996US9720022B2Systems and methods for providing characteristics of an impedance matching model for use with matching networksLAM RES CORP·Filed 2015·Granted Aug 1, 2017·21 cites·25 claims
- 1095US11929235B2Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHZ RF generatorLAM RES CORP·Filed 2020·Granted Mar 12, 2024·3 cites·32 claims
- 1195US10853444B2Systems and methods for tuning an impedance matching network in a step-wise fashionLAM RES CORP·Filed 2020·Granted Dec 1, 2020·5 cites·20 claims
- 1295US9711332B2Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generatorLAM RES CORP·Filed 2016·Granted Jul 18, 2017·17 cites·21 claims
- 1395US6441555B1Plasma excitation coilLAM RES CORP·Filed 2000·Granted Aug 27, 2002·53 cites·39 claims
- 1494US9837252B2Systems and methods for using one or more fixtures and efficiency to determine parameters of a match network modelLAM RES CORP·Filed 2016·Granted Dec 5, 2017·10 cites·18 claims
- 1594US9831071B2Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine a match network modelLAM RES CORP·Filed 2016·Granted Nov 28, 2017·12 cites·18 claims
- 1694US6125025AElectrostatic dechucking method and apparatus for dielectric workpieces in vacuum processorsLAM RES CORP·Filed 1998·Granted Sep 26, 2000·158 cites·42 claims
- 1793US10020168B1Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generatorLAM RES CORP·Filed 2017·Granted Jul 10, 2018·6 cites·25 claims
- 1892US7218503B2Method of determining the correct average bias compensation voltage during a plasma processLAM RES CORP·Filed 2004·Granted May 15, 2007·61 cites·13 claims
- 1992US6646385B2Plasma excitation coilLAM RES CORP·Filed 2002·Granted Nov 11, 2003·38 cites·51 claims
- 2092US6265831B1Plasma processing method and apparatus with control of rf biasLAM RES CORP·Filed 1999·Granted Jul 24, 2001·78 cites·19 claims
- 2191US10296676B2Systems and methods for tuning an impedance matching network in a step-wise fashionLAM RES CORP·Filed 2016·Granted May 21, 2019·10 cites·21 claims
- 2291US8241701B2Processes and systems for engineering a barrier surface for copper depositionDORDI YEZDI·Filed 2006·Granted Aug 14, 2012·16 cites·28 claims
- 2390US10762266B2Segmenting a model within a plasma systemLAM RES CORP·Filed 2019·Granted Sep 1, 2020·4 cites·20 claims
- 2490US10621265B2Systems and methods for tuning an impedance matching network in a step-wise fashionLAM RES CORP·Filed 2019·Granted Apr 14, 2020·6 cites·20 claims
- 2590US8771804B2Processes and systems for engineering a copper surface for selective metal depositionDORDI YEZDI·Filed 2006·Granted Jul 8, 2014·16 cites·27 claims
- 2690US6838832B1Apparatus and methods for improving the stability of RF power delivery to a plasma loadLAM RES CORP·Filed 2002·Granted Jan 4, 2005·34 cites·174 claims
- 2789US10474780B2Segmenting a model within a plasma systemLAM RES CORP·Filed 2017·Granted Nov 12, 2019·4 cites·29 claims
- 2889US7905982B2Antenna for plasma processor apparatusLAM RES CORP·Filed 2005·Granted Mar 15, 2011·8 cites·22 claims
- 2987US10911081B2Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected powerLAM RES CORP·Filed 2019·Granted Feb 2, 2021·4 cites·20 claims
- 3086US10403482B2Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generatorLAM RES CORP·Filed 2017·Granted Sep 3, 2019·4 cites·24 claims
- 3185US10276350B2Systems and methods for using computer-generated models to reduce reflected power towards an RF generator during state transitions of the RF generator by controlling RF values of the RF generatorLAM RES CORP·Filed 2016·Granted Apr 30, 2019·5 cites·14 claims
- 3283US10832979B2Feedback control system for iterative etch processLAM RES CORP·Filed 2018·Granted Nov 10, 2020·3 cites·30 claims
- 3383US8747960B2Processes and systems for engineering a silicon-type surface for selective metal deposition to form a metal silicideDORDI YEZDI·Filed 2006·Granted Jun 10, 2014·11 cites·20 claims
- 3482US8277604B2Antenna for plasma processor and apparatusHOWALD ARTHUR M·Filed 2011·Granted Oct 2, 2012·4 cites·11 claims
- 3582US7196896B2Dechucking method and apparatus for workpieces in vacuum processorsLAM RES CORP·Filed 2004·Granted Mar 27, 2007·22 cites·25 claims
- 3682US6965506B2System and method for dechucking a workpiece from an electrostatic chuckLAM RES CORP·Filed 2002·Granted Nov 15, 2005·26 cites·60 claims
- 3780US9594105B2Cable power loss determination for virtual metrologyLAM RES CORP·Filed 2014·Granted Mar 14, 2017·3 cites·19 claims
- 3878US6074516AHigh sputter, etch resistant window for plasma processing chambersLAM RES CORP·Filed 1998·Granted Jun 13, 2000·30 cites·18 claims
- 3976US9927481B2Cable power loss determination for virtual metrologyLAM RES CORP·Filed 2017·Granted Mar 27, 2018·1 cites·15 claims
- 4075US9117860B2Controlled ambient system for interface engineeringBOYD JOHN·Filed 2006·Granted Aug 25, 2015·5 cites·13 claims
- 4173US6842147B2Method and apparatus for producing uniform processing ratesLAM RES CORP·Filed 2002·Granted Jan 11, 2005·15 cites·25 claims
- 4272US4186508ALine guide for fishing rodSHAKESPEARE CO·Filed 1978·Granted Feb 5, 1980·22 cites·12 claims
- 4371US7583492B2Method of determining the correct average bias compensation voltage during a plasma processLAM RES CORP·Filed 2007·Granted Sep 1, 2009·3 cites·17 claims
- 4469US8454794B2Antenna for plasma processor and apparatusHOWALD ARTHUR M·Filed 2012·Granted Jun 4, 2013·1 cites·13 claims
- 4569US7709400B2Thermal methods for cleaning post-CMP wafersLAM RES CORP·Filed 2007·Granted May 4, 2010·2 cites·25 claims
- 4667US6790375B1Dechucking method and apparatus for workpieces in vacuum processorsLAM RES CORP·Filed 1998·Granted Sep 14, 2004·28 cites·6 claims
- 4766US7140374B2System, method and apparatus for self-cleaning dry etchLAM RES CORP·Filed 2004·Granted Nov 28, 2006·8 cites·17 claims
- 4863US8211238B2System, method and apparatus for self-cleaning dry etchBAILEY III ANDREW D·Filed 2006·Granted Jul 3, 2012·1 cites·16 claims
- 4963US8084356B2Methods of low-K dielectric and metal process integrationDORDI YEZDI N·Filed 2008·Granted Dec 27, 2011·3 cites·21 claims
- 5061US10256078B2Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generatorLAM RES CORP·Filed 2018·Granted Apr 9, 2019·0 cites·40 claims
Showing the top 50 of 58 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →