Inventor · disambiguated record
Arulselvam Simon Jeyapalan
Also filed as: JEYAPALAN ARULSELVAM SIMON
3 granted patents·1 pending application·2 citations·filing 2017–2025
50Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0172US2025293063A1Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2025·Application pending·0 cites
- 0270US10509052B2Smart vibration wafer with optional integration with semiconductor processing toolLAM RES CORP·Filed 2017·Granted Dec 17, 2019·2 cites·20 claims
- 0356US12341040B2Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2020·Granted Jun 24, 2025·0 cites·19 claims
- 0452US12485554B2Wafer handling robot with gravitational field sensorLAM RES CORP·Filed 2020·Granted Dec 2, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →