Inventor · disambiguated record
Arun Keshavamurthy
Also filed as: KESHAVAMURTHY ARUN
3 granted patents·5 pending applications·3 citations·filing 2012–2022
53Inventor score
Top patents by PatentIndex Score
8 records- 0174US10351955B2Semiconductor substrate processing apparatus including uniformity bafflesLAM RES CORP·Filed 2014·Granted Jul 16, 2019·1 cites·20 claims
- 0272US10503703B1Method for parallel file system upgrade in virtual storage environmentEMC CORP·Filed 2016·Granted Dec 10, 2019·2 cites·24 claims
- 0354US2023140263A1Showerheads with high solidity plenumsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0450US2015184292A1Systems and methods for preventing mixing of two gas streams in a processing chamberLAM RES CORP·Filed 2014·Application pending·0 cites
- 0548US2023402259A1Localized plasma arc prevention via purge ringLAM RES CORP·Filed 2021·Application pending·0 cites
- 0646US2025031344A1Microchannel assembly cooled power circuits for power boxes of substrate processing systemsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0736US9275884B2Systems and methods for inhibiting oxide growth in substrate handler vacuum chambersKHOSLA MUKUL·Filed 2012·Granted Mar 1, 2016·0 cites·9 claims
- 0834US2017278679A1Method and apparatus for controlling process within wafer uniformityLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →