Inventor · disambiguated record
Armin Liebchen
Also filed as: LIEBCHEN ARMIN
5 granted patents·150 citations·filing 2001–2006
83Inventor score
Files withASML MASKTOOLS BV5
Top patents by PatentIndex Score
5 records- 0193US6738859B2Method and apparatus for fast aerial image simulationASML MASKTOOLS BV·Filed 2001·Granted May 18, 2004·82 cites·17 claims
- 0290US7652758B2Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systemsASML MASKTOOLS BV·Filed 2006·Granted Jan 26, 2010·11 cites·18 claims
- 0387US7116411B2Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systemsASML MASKTOOLS BV·Filed 2004·Granted Oct 3, 2006·27 cites·6 claims
- 0484US7355673B2Method, program product and apparatus of simultaneous optimization for NA-Sigma exposure settings and scattering bars OPC using a device layoutASML MASKTOOLS BV·Filed 2004·Granted Apr 8, 2008·25 cites·11 claims
- 0554US7034919B2Method and apparatus for providing lens aberration compensation by illumination source optimizationASML MASKTOOLS BV·Filed 2003·Granted Apr 25, 2006·5 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →