Inventor · disambiguated record
Arne Schob
Also filed as: SCHOB ARNE
1 granted patent·4 pending applications·1 citations·filing 2014–2024
14Inventor score
Files withZEISS CARL SMT GMBH5
Top patents by PatentIndex Score
5 records- 0160US2025208397A1Optical system for a metrology system and metrology system with such an optical systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0259US9372411B2Projection objective of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Jun 21, 2016·1 cites·34 claims
- 0359US2025044680A1Mask inspection device for photomasks of euv lithography and carrier element for use in a mask inspection deviceZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0458US2024369945A1Optical system for a metrology system and metrology system with such an optical systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0552US2024369946A1Optical system for a metrology system and metrology system with such an optical systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →