Inventor · disambiguated record
Arul Shanmugasundram
Also filed as: SHANMUGASUNDRAM ARUL
3 granted patents·1 pending application·51 citations·filing 1996–2016
72Inventor score
Top patents by PatentIndex Score
4 records- 0170US6379221B1Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1996·Granted Apr 30, 2002·34 cites·12 claims
- 0257US6648588B2Multiple sided robot blade for semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2002·Granted Nov 18, 2003·6 cites·14 claims
- 0345US6481951B1Multiple sided robot blade for semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 1999·Granted Nov 19, 2002·11 cites·20 claims
- 0434US2018358495A1Dielectric coating formulation for metal integrated solar panelTata Power Solar Systems Ltd·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →