Inventor · disambiguated record
Arkadiy Shimanovich
Also filed as: SHIMANOVICH ARKADIY · SHIMANOVICH ARKADIY I
3 granted patents·210 citations·filing 2000–2001
77Inventor score
Files withNOVELLUS SYSTEMS INC3
Top patents by PatentIndex Score
3 records- 0192US6333268B1Method and apparatus for removing post-etch residues and other adherent matricesNOVELLUS SYSTEMS INC·Filed 2000·Granted Dec 25, 2001·117 cites·10 claims
- 0291US6563092B1Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometryNOVELLUS SYSTEMS INC·Filed 2001·Granted May 13, 2003·73 cites·28 claims
- 0374US7105061B1Method and apparatus for sealing substrate load port in a high pressure reactorNOVELLUS SYSTEMS INC·Filed 2001·Granted Sep 12, 2006·20 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →