Inventor · disambiguated record
Arunkumar Tatti
Also filed as: TATTI ARUNKUMAR · TATTI ARUNKUMAR M
4 granted patents·3 pending applications·3 citations·filing 2017–2024
60Inventor score
Files withAPPLIED MATERIALS INC7
Top patents by PatentIndex Score
7 records- 0179US10325790B2Methods and apparatus for correcting substrate deformityAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·3 cites·20 claims
- 0276US12437999B2Methods and apparatus for mask patterning debris removalAPPLIED MATERIALS INC·Filed 2024·Granted Oct 7, 2025·0 cites·12 claims
- 0372US12463075B2Cathode assembly for integration of embedded electrostatic chuck (ESC)APPLIED MATERIALS INC·Filed 2024·Granted Nov 4, 2025·0 cites·20 claims
- 0463US12068159B2Methods and apparatus for mask patterning debris removalAPPLIED MATERIALS INC·Filed 2021·Granted Aug 20, 2024·0 cites·8 claims
- 0557US2025054737A1Electrostatic Chuck with High Cooling EfficiencyAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0654US2025273498A1Embedded electrostatic chuck (esc)APPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0745US2022108908A1Shadow ring kit for plasma etch wafer singulation processAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →