Inventor · disambiguated record
Asahiro Kuni
Also filed as: AKIYAMA NOBUYUKI · KUNI ASAHIRO
41 granted patents·3 pending applications·1,316 citations·filing 1976–2007
98Inventor score
Top patents by PatentIndex Score
44 records- 0199US5986263AElectron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 1997·Granted Nov 16, 1999·164 cites·21 claims
- 0297US4449818AMethod of inspecting microscopic surface defectsHITACHI METALS LTD·Filed 1982·Granted May 22, 1984·124 cites·8 claims
- 0396US6465781B1Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatusHITACHI LTD·Filed 2000·Granted Oct 15, 2002·85 cites·25 claims
- 0492US6587581B1Visual inspection method and apparatus thereforHITACHI LTD·Filed 1998·Granted Jul 1, 2003·118 cites·59 claims
- 0592US6172365B1Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 1999·Granted Jan 9, 2001·48 cites·10 claims
- 0692US4447731AExterior view examination apparatusHITACHI LTD·Filed 1981·Granted May 8, 1984·45 cites·7 claims
- 0791US6373054B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2001·Granted Apr 16, 2002·23 cites·22 claims
- 0891US4153371AMethod and apparatus for reduction-projection type mask alignmentHITACHI LTD·Filed 1977·Granted May 8, 1979·55 cites·9 claims
- 0990US4666291ALight-exposure apparatusHITACHI LTD·Filed 1986·Granted May 19, 1987·57 cites·7 claims
- 1087US6717142B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2002·Granted Apr 6, 2004·16 cites·15 claims
- 1186US7133550B2Pattern inspection method and apparatusHITACHI LTD·Filed 2001·Granted Nov 7, 2006·19 cites·15 claims
- 1286US6898305B2Circuit pattern inspection method and apparatusHITACHI LTD·Filed 2001·Granted May 24, 2005·40 cites·24 claims
- 1386US6087673AMethod of inspecting pattern and apparatus thereofHITACHI LTD·Filed 1998·Granted Jul 11, 2000·58 cites·29 claims
- 1485US4213117AMethod and apparatus for detecting positions of chips on a semiconductor waferHITACHI LTD·Filed 1978·Granted Jul 15, 1980·49 cites·11 claims
- 1585US4095905ASurface-defect detecting deviceHITACHI LTD·Filed 1976·Granted Jun 20, 1978·33 cites·26 claims
- 1684US7439504B2Pattern inspection method and apparatus using electron beamHITACHI LTD·Filed 2005·Granted Oct 21, 2008·6 cites·4 claims
- 1783US7957579B2Pattern inspection method and apparatusHITACHI LTD·Filed 2007·Granted Jun 7, 2011·5 cites·11 claims
- 1883US7894658B2Pattern inspection method and apparatusHITACHI LTD·Filed 2007·Granted Feb 22, 2011·4 cites·17 claims
- 1983US6828554B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2004·Granted Dec 7, 2004·11 cites·8 claims
- 2081US6236057B1Method of inspecting pattern and apparatus thereof with a differential brightness image detectionHITACHI LTD·Filed 2000·Granted May 22, 2001·15 cites·23 claims
- 2180US7266235B2Pattern inspection method and apparatusHITACHI LTD·Filed 2001·Granted Sep 4, 2007·10 cites·13 claims
- 2280US6614022B2Pattern inspection method and apparatus using electron beamHITACHI LTD·Filed 2001·Granted Sep 2, 2003·11 cites·28 claims
- 2379US7269280B2Method and its apparatus for inspecting a patternHITACHI LTD·Filed 2002·Granted Sep 11, 2007·22 cites·26 claims
- 2476US4777641AMethod and apparatus for alignmentHITACHI LTD·Filed 1986·Granted Oct 11, 1988·27 cites·5 claims
- 2575US6975754B2Circuit pattern inspection method and apparatusHITACHI LTD·Filed 2001·Granted Dec 13, 2005·19 cites·42 claims
- 2675US6347150B1Method and system for inspecting a patternHITACHI LTD·Filed 1997·Granted Feb 12, 2002·52 cites·17 claims
- 2774US7457453B2Pattern inspection method and apparatusHITACHI LTD·Filed 2007·Granted Nov 25, 2008·4 cites·4 claims
- 2874US4814615AMethod and apparatus for detecting defect in circuit pattern of a mask for X-ray exposureHITACHI LTD·Filed 1987·Granted Mar 21, 1989·31 cites·15 claims
- 2973US6376854B2Method of inspecting a pattern on a substrateHITACHI LTD·Filed 2001·Granted Apr 23, 2002·8 cites·10 claims
- 3073US4788577ASubstrate surface deflecting deviceHITACHI LTD·Filed 1988·Granted Nov 29, 1988·22 cites·4 claims
- 3172US4242702AApparatus for automatically checking external appearance of objectHITACHI LTD·Filed 1977·Granted Dec 30, 1980·21 cites·23 claims
- 3271US6940069B2Pattern inspection method and apparatus using electron beamHITACHI LTD·Filed 2003·Granted Sep 6, 2005·6 cites·11 claims
- 3370US7260256B2Method and system for inspecting a patternRENESAS TECH CORP·Filed 2000·Granted Aug 21, 2007·14 cites·5 claims
- 3469US7122796B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2004·Granted Oct 17, 2006·4 cites·11 claims
- 3567US6507029B1Sample processing apparatus and method for removing charge on sample through light irradiationHITACHI LTD·Filed 1999·Granted Jan 14, 2003·20 cites·9 claims
- 3664US4556797AMethod and apparatus for detecting edge of fine pattern on specimenHITACHI LTD·Filed 1983·Granted Dec 3, 1985·11 cites·3 claims
- 3763US2005080647A1Business process diagnostic method and business process diagnostic systemFiled 2004·Application pending·0 cites
- 3861US5463667AInspection method for soldered joints using x-ray imaging and apparatus thereforHITACHI LTD·Filed 1993·Granted Oct 31, 1995·25 cites·6 claims
- 3952US4504045AWafer transforming deviceHITACHI LTD·Filed 1982·Granted Mar 12, 1985·16 cites·9 claims
- 4047US2008002876A1Method and its apparatus for inspecting a patternHIROI TAKASHI·Filed 2007·Application pending·0 cites
- 4145US7049587B2Apparatus for inspecting a specimenHITACHI LTD·Filed 2002·Granted May 23, 2006·2 cites·20 claims
- 4244US4708484AProjection alignment method and apparatusHITACHI LTD·Filed 1985·Granted Nov 24, 1987·8 cites·7 claims
- 4341US4647196ASurface flaw detection methodHITACHI METALS LTD·Filed 1985·Granted Mar 3, 1987·8 cites·4 claims
- 4438US2007131877A9Pattern inspection method and system thereforHIROI TAKASHI·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →