Inventor · disambiguated record
Ashish Saurabh
Also filed as: SAURABH ASHISH
3 granted patents·5 pending applications·3 citations·filing 2018–2025
54Inventor score
Files withLAM RES CORP8
Top patents by PatentIndex Score
8 records- 0180US11236422B2Multi zone substrate support for ALD film property correction and tunabilityLAM RES CORP·Filed 2018·Granted Feb 1, 2022·3 cites·8 claims
- 0270US2024392443A1Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processesLAM RES CORP·Filed 2024·Application pending·0 cites
- 0364US2025171902A1Temperature control of a multi-zone pedestalLAM RES CORP·Filed 2025·Application pending·0 cites
- 0463US12209312B2Temperature control of a multi-zone pedestalLAM RES CORP·Filed 2020·Granted Jan 28, 2025·0 cites·23 claims
- 0554US12071689B2Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processesLAM RES CORP·Filed 2020·Granted Aug 27, 2024·0 cites·22 claims
- 0651US2025038034A1Method and apparatus for radio frequency grid design in an esc to reduce film asymmetryLAM RES CORP·Filed 2023·Application pending·0 cites
- 0745US2022333239A1Tunable and non-tunable heat shields to affect temperature distribution profiles of substrate supportsLAM RES CORP·Filed 2020·Application pending·0 cites
- 0844US2023341448A1Accurate determination of radio frequency power through digital inversion of sensor effectsLAM RES CORP·Filed 2021·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Ashish Saurabh files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →