Inventor · disambiguated record
Ashawaraya Shalini
Also filed as: SHALINI ASHAWARAYA
3 granted patents·4 pending applications·0 citations·filing 2022–2025
42Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0175US2025283760A1Optical emission spectroscopy for advanced process characterizationTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0274US12306044B2Optical emission spectroscopy for advanced process characterizationTOKYO ELECTRON LTD·Filed 2022·Granted May 20, 2025·0 cites·20 claims
- 0363US12158374B2Time-resolved OES data collectionTOKYO ELECTRON LTD·Filed 2022·Granted Dec 3, 2024·0 cites·20 claims
- 0458US2025293012A1System and method for semiconductor processingTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0556US12362158B2Method for OES data collection and endpoint detectionTOKYO ELECTRON LTD·Filed 2022·Granted Jul 15, 2025·0 cites·20 claims
- 0654US2024339309A1Advanced OES CharacterizationTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0753US2025138429A1Endpoint detection in dry development of photoresistTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →