Inventor · disambiguated record
Atsuko Fukada
Also filed as: FUKADA ATSUKO
9 granted patents·1 pending application·90 citations·filing 2006–2012
88Inventor score
Top patents by PatentIndex Score
10 records- 0195US7449690B2Inspection method and inspection apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 11, 2008·28 cites·20 claims
- 0292US7462828B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 9, 2008·18 cites·30 claims
- 0389US8153969B2Inspection method and inspection system using charged particle beamFUKADA ATSUKO·Filed 2008·Granted Apr 10, 2012·16 cites·7 claims
- 0486US7875849B2Electron beam apparatus and electron beam inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 25, 2011·7 cites·12 claims
- 0582US8431893B2Electron beam apparatus and electron beam inspection methodFUKUDA MUNEYUKI·Filed 2012·Granted Apr 30, 2013·4 cites·2 claims
- 0682US8026481B2Charged particle apparatus, scanning electron microscope, and sample inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 27, 2011·6 cites·7 claims
- 0781US8207498B2Electron beam apparatus and electron beam inspection methodFUKUDA MUNEYUKI·Filed 2011·Granted Jun 26, 2012·4 cites·2 claims
- 0875US7847249B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 7, 2010·4 cites·18 claims
- 0975US7504626B2Scanning electron microscope and apparatus for detecting defectHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 17, 2009·3 cites·23 claims
- 1051US2012004879A1Charged particle apparatus, scanning electron microscope, and sample inspection methodFUKUDA MUNEYUKI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →