Inventor · disambiguated record
Atsushi Shiokawa
Also filed as: SHIOKAWA ATSUSHI
7 granted patents·3 pending applications·68 citations·filing 1998–2019
84Inventor score
Files withEBARA CORP10
Top patents by PatentIndex Score
10 records- 0187US10978315B2Vacuum evacuation systemEBARA CORP·Filed 2015·Granted Apr 13, 2021·5 cites·9 claims
- 0273US6589009B1Turbo-molecular pumpEBARA CORP·Filed 2000·Granted Jul 8, 2003·20 cites·4 claims
- 0353US11396876B2Control device, control system, control method, recording medium and machine learning deviceEBARA CORP·Filed 2019·Granted Jul 26, 2022·0 cites·8 claims
- 0452US6220831B1Turbomolecular pumpEBARA CORP·Filed 1998·Granted Apr 24, 2001·18 cites·10 claims
- 0549US2020109470A1Vacuum evacuation systemEBARA CORP·Filed 2019·Application pending·0 cites
- 0646US6307294B1Magnetic suspending device controlled by temperature of controlled objectEBARA CORP·Filed 2000·Granted Oct 23, 2001·3 cites·3 claims
- 0744US6062810ATurbomolecular pumpEBARA CORP·Filed 1998·Granted May 16, 2000·12 cites·5 claims
- 0841US6217278B1Turbomolecular pumpEBARA CORP·Filed 1998·Granted Apr 17, 2001·10 cites·12 claims
- 0939US2016265532A1Vacuum pumpEBARA CORP·Filed 2016·Application pending·0 cites
- 1037US2003017047A1Turbo-molecular pumpEBARA CORP·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →