Inventor · disambiguated record
Atsuhiko Tabuchi
Also filed as: TABUCHI ATSUHIKO
4 granted patents·18 citations·filing 2012–2018
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0182US10553463B2Temperature control system, semiconductor manufacturing device, and temperature control methodTOKYO ELECTRON LTD·Filed 2018·Granted Feb 4, 2020·4 cites·12 claims
- 0282US9984908B2Temperature control system, semiconductor manufacturing device, and temperature control methodTOKYO ELECTRON LTD·Filed 2012·Granted May 29, 2018·7 cites·12 claims
- 0374US8809197B2Plasma etching apparatus and control methodTOKYO ELECTRON LTD·Filed 2013·Granted Aug 19, 2014·4 cites·16 claims
- 0470US9664460B2Method of supplying temperature control fluid to temperature control system and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted May 30, 2017·3 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →