Inventor · disambiguated record
Atsushi Takane
Also filed as: TAKANE ATSUSHI
43 granted patents·4 pending applications·688 citations·filing 1990–2009
98Inventor score
Files withHITACHI HIGH TECH CORP20HITACHI LTD18TAKANE ATSUSHI3HITACHI MEDICAL CORP1HITACHI SCIENCE SYSTEMS INC1
Top patents by PatentIndex Score
47 records- 0199US6538249B1Image-formation apparatus using charged particle beams under various focus conditionsHITACHI LTD·Filed 2000·Granted Mar 25, 2003·118 cites·36 claims
- 0297US7026615B2Semiconductor inspection systemHITACHI LTD·Filed 2003·Granted Apr 11, 2006·65 cites·7 claims
- 0394US7235782B2Semiconductor inspection systemHITACHI LTD·Filed 2002·Granted Jun 26, 2007·43 cites·24 claims
- 0493US7214936B2Charged particle beam apparatus and dimension measuring methodHITACHI HIGH TECH CORP·Filed 2005·Granted May 8, 2007·15 cites·9 claims
- 0593US7109485B2Charged particle beam apparatusHITACHI LTD·Filed 2005·Granted Sep 19, 2006·19 cites·5 claims
- 0693US6864493B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2002·Granted Mar 8, 2005·36 cites·24 claims
- 0790US8335397B2Charged particle beam apparatusTAKANE ATSUSHI·Filed 2008·Granted Dec 18, 2012·47 cites·7 claims
- 0890US7642514B2Charged particle beam apparatusHITACHI LTD·Filed 2007·Granted Jan 5, 2010·14 cites·8 claims
- 0990US6653633B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Nov 25, 2003·22 cites·7 claims
- 1089US7329868B2Charged particle beam apparatusHITACHI LTD·Filed 2006·Granted Feb 12, 2008·7 cites·3 claims
- 1187US5355885AIlluminating method and apparatus in nuclear magnetic resonance inspectionHITACHI MEDICAL CORP·Filed 1992·Granted Oct 18, 1994·63 cites·24 claims
- 1286US7435957B2Charged particle beam equipment and charged particle microscopyHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 14, 2008·8 cites·22 claims
- 1386US7340111B2Image evaluation method and microscopeHITACHI LTD·Filed 2005·Granted Mar 4, 2008·6 cites·5 claims
- 1486US7034296B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2001·Granted Apr 25, 2006·24 cites·17 claims
- 1585US7973282B2Charged particle beam apparatus and dimension measuring methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 5, 2011·6 cites·16 claims
- 1685US7236651B2Image evaluation method and microscopeHITACHI LTD·Filed 2002·Granted Jun 26, 2007·16 cites·20 claims
- 1784US6936818B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Aug 30, 2005·12 cites·6 claims
- 1882US8026491B2Charged particle beam apparatus and method for charged particle beam adjustmentHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 27, 2011·9 cites·5 claims
- 1979US7923701B2Charged particle beam equipmentHITACHI HIGH TECH CORP·Filed 2008·Granted Apr 12, 2011·4 cites·14 claims
- 2079US7375330B2Charged particle beam equipmentHITACHI HIGH TECH CORP·Filed 2006·Granted May 20, 2008·4 cites·13 claims
- 2179US6963067B2Scanning electron microscope and sample observing method using itHITACHI SCIENCE SYSTEMS INC·Filed 2004·Granted Nov 8, 2005·20 cites·16 claims
- 2278US7805023B2Image evaluation method and microscopeHITACHI LTD·Filed 2007·Granted Sep 28, 2010·3 cites·20 claims
- 2378US7800059B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 21, 2010·3 cites·6 claims
- 2478US6756590B2Shape measurement method and apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Jun 29, 2004·14 cites·13 claims
- 2576US8041104B2Pattern matching apparatus and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 18, 2011·12 cites·25 claims
- 2676US7605381B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Oct 20, 2009·9 cites·7 claims
- 2776US7166840B2Method for determining depression/protrusion of sample and charged particle beam apparatus thereforHITACHI LTD·Filed 2005·Granted Jan 23, 2007·3 cites·4 claims
- 2876US6872943B2Method for determining depression/protrusion of sample and charged particle beam apparatus thereforHITACHI LTD·Filed 2002·Granted Mar 29, 2005·10 cites·18 claims
- 2975US8030614B2Charged particle beam apparatus and dimension measuring methodHITACHI HIGH TECH CORP·Filed 2009·Granted Oct 4, 2011·2 cites·12 claims
- 3075US7633063B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 15, 2009·3 cites·14 claims
- 3173US7361894B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 22, 2008·6 cites·10 claims
- 3271US7652249B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 26, 2010·2 cites·22 claims
- 3370US7459683B2Charged particle beam device with DF-STEM image valuation methodHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 2, 2008·3 cites·13 claims
- 3470US7372047B2Charged particle system and a method for measuring image magnificationHITACHI HIGH TECH CORP·Filed 2005·Granted May 13, 2008·2 cites·19 claims
- 3566US8263935B2Charged particle beam apparatusTAKANE ATSUSHI·Filed 2009·Granted Sep 11, 2012·1 cites·23 claims
- 3663US7164126B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Jan 16, 2007·5 cites·1 claims
- 3763US5189369ANMR imaging method of low flow rate fluidHITACHI LTD·Filed 1991·Granted Feb 23, 1993·23 cites·9 claims
- 3863US2010006755A1Charged particle beam alignment method and charged particle beam apparatusSATO MITSUGO·Filed 2009·Application pending·0 cites
- 3961US8558999B2Defect inspection apparatus and method utilizing multiple inspection conditionsKAWAKI KOJI·Filed 2008·Granted Oct 15, 2013·2 cites·2 claims
- 4058US8304722B2Charged particle beam equipment and charged particle microscopyINADA HIROMI·Filed 2008·Granted Nov 6, 2012·0 cites·3 claims
- 4157US2007194236A1Semiconductor inspection systemTAKANE ATSUSHI·Filed 2007·Application pending·0 cites
- 4250US5391989AMagnetic resonance imaging method and apparatus for imaging a fluid portion in a bodyHITACHI LTD·Filed 1992·Granted Feb 21, 1995·13 cites·34 claims
- 4345US7433542B2Method for measuring line and space pattern using scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2004·Granted Oct 7, 2008·2 cites·11 claims
- 4445US5148109AMagnetic resonance imaging method and system thereforHITACHI LTD·Filed 1990·Granted Sep 15, 1992·10 cites·14 claims
- 4544US7078688B2Shape measuring device and shape measuring methodHITACHI HIGH TECH CORP·Filed 2004·Granted Jul 18, 2006·2 cites·6 claims
- 4644US2004164243A1Shape measurement method and apparatusHITACHI HIGH TECH CORP·Filed 2004·Application pending·0 cites
- 4739US2006219907A1Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivityOGASHIWA TAKESHI·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →