Inventor · disambiguated record
Audrey Berthelot
Also filed as: BERTHELOT AUDREY
10 granted patents·3 pending applications·37 citations·filing 2006–2024
83Inventor score
Top patents by PatentIndex Score
13 records- 0191US8692337B2Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configurationBERTHELOT AUDREY·Filed 2012·Granted Apr 8, 2014·26 cites·13 claims
- 0284US8580597B2Making of a microelectronic device including a monocrystalline silicon NEMS component and a transistor the gate of which is made in the same layer as the mobile structure of this componentOLLIER ERIC·Filed 2010·Granted Nov 12, 2013·7 cites·15 claims
- 0373US11538718B2Method of producing semiconductor devices in a substrate including etching of the pattern of an etch mask and/or a reticle to create the first dicing lanes encircling the devices and second dicing lanes defined by fracture lines of the edges of the substrateCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2018·Granted Dec 27, 2022·2 cites·16 claims
- 0460US2025171299A1Method for manufacturing a packaging structureCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2024·Application pending·0 cites
- 0556US2023348262A1Mems device manufacturing methodCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2023·Application pending·0 cites
- 0655US8865564B2Process for producing vertical interconnections through structured layersBERTHELOT AUDREY·Filed 2012·Granted Oct 21, 2014·1 cites·20 claims
- 0754US9783407B2Method for making a suspended membrane structure with buried electrodeGIROUD SOPHIE·Filed 2012·Granted Oct 10, 2017·1 cites·16 claims
- 0847US10472227B2Micro-device having a plurality of mobile elements arranged in a plurality of embedded cavitiesCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2018·Granted Nov 12, 2019·0 cites·20 claims
- 0946US8999860B2Process for producing at least one silicon-based nanoelement in a silicon oxide section and process for the manufacture of a device employing the production processCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2013·Granted Apr 7, 2015·0 cites·15 claims
- 1045US11459227B2Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movementCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2017·Granted Oct 4, 2022·0 cites·16 claims
- 1140US11312618B2Microdevice comprising at least two movable elementsCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2018·Granted Apr 26, 2022·0 cites·19 claims
- 1237US9802817B2Method for making suspended elements with different thicknesses for a MEMS and NEMS structureCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2015·Granted Oct 31, 2017·0 cites·19 claims
- 1327US2009114970A1Embedded dram with increased capacitance and method of manufacturing sameNXP BV·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →