Inventor · disambiguated record
Avinash Shervegar
Also filed as: SHERVEGAR AVINASH · SHERVEGAR AVINASH ISHWAR
3 granted patents·4 pending applications·4 citations·filing 2015–2023
56Inventor score
Top patents by PatentIndex Score
7 records- 0191US12385159B2In-situ epi growth rate control of crystal thickness micro-balancing sensorAPPLIED MATERIALS INC·Filed 2022·Granted Aug 12, 2025·2 cites·20 claims
- 0279US11823871B2Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing toolAPPLIED MATERIALS INC·Filed 2019·Granted Nov 21, 2023·2 cites·20 claims
- 0361US12449309B2Methods for detection using optical emission spectroscopyAPPLIED MATERIALS INC·Filed 2020·Granted Oct 21, 2025·0 cites·20 claims
- 0456US2024222094A1Workpiece Processing Apparatus with Contact Temperature SensorBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Application pending·0 cites
- 0550US2019311886A1Microwave Plasma Source With Split WindowAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0643US2023154766A1Pre-clean chamber assembly architecture for improved serviceabilityAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 0739US2015368796A1Apparatus for gas injection to epitaxial chamberAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →