Inventor · disambiguated record
Ayano Hagiwara
Also filed as: HAGIWARA AYANO
4 granted patents·3 pending applications·3 citations·filing 2016–2025
60Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0174US9607855B2Etching method and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Mar 28, 2017·2 cites·10 claims
- 0265US11189498B2Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing filmTOKYO ELECTRON LTD·Filed 2019·Granted Nov 30, 2021·1 cites·5 claims
- 0357US10665470B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2018·Granted May 26, 2020·0 cites·8 claims
- 0456US2020234974A1Etching Method and Etching ApparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0550US11373874B2Etching method and apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jun 28, 2022·0 cites·10 claims
- 0649US2025183048A1Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0748US2025183043A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →