Inventor · disambiguated record
Babak Kadkhodayan
Also filed as: KADKHODAYAN BABAK
14 granted patents·7 pending applications·1,229 citations·filing 1999–2013
94Inventor score
Top patents by PatentIndex Score
21 records- 0198US8402918B2Showerhead electrode with centering featureKADKHODAYAN BABAK·Filed 2009·Granted Mar 26, 2013·435 cites·14 claims
- 0298US8206506B2Showerhead electrodeKADKHODAYAN BABAK·Filed 2008·Granted Jun 26, 2012·434 cites·13 claims
- 0397US8161906B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2008·Granted Apr 24, 2012·49 cites·17 claims
- 0495US8900398B2Local plasma confinement and pressure control arrangement and methods thereofDHINDSA RAJINDER·Filed 2010·Granted Dec 2, 2014·27 cites·14 claims
- 0595US6974523B2Hollow anode plasma reactor and methodLAM RES CORP·Filed 2001·Granted Dec 13, 2005·59 cites·37 claims
- 0695US6242360B1Plasma processing system apparatus, and method for delivering RF power to a plasma processingLAM RES CORP·Filed 1999·Granted Jun 5, 2001·107 cites·21 claims
- 0793US8313805B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2012·Granted Nov 20, 2012·16 cites·10 claims
- 0891US7169231B2Gas distribution system with tuning gasLAM RES CORP·Filed 2002·Granted Jan 30, 2007·47 cites·13 claims
- 0986US7371332B2Uniform etch systemLAM RES CORP·Filed 2003·Granted May 13, 2008·29 cites·11 claims
- 1085US8500953B2Edge ring assembly with dielectric spacer ringCHANG JEREMY·Filed 2009·Granted Aug 6, 2013·12 cites·15 claims
- 1182US8911589B2Edge ring assembly with dielectric spacer ringLAM RES CORP·Filed 2013·Granted Dec 16, 2014·4 cites·9 claims
- 1263US8801892B2Uniform etch systemLARSON DEAN J·Filed 2008·Granted Aug 12, 2014·1 cites·7 claims
- 1361US8465620B2Hollow anode plasma reactor and methodBENZING DAVID W·Filed 2008·Granted Jun 18, 2013·1 cites·21 claims
- 1454US2006027328A1Hollow anode plasma reactor and methodLAM RES CORP·Filed 2005·Application pending·0 cites
- 1553US2009090695A1Yttria insulator ring for use inside a plasma chamberLAM RES CORP·Filed 2008·Application pending·0 cites
- 1648US2011024049A1Light-up prevention in electrostatic chucksC O LAM RES CORP·Filed 2009·Application pending·0 cites
- 1745US2007032081A1Edge ring assembly with dielectric spacer ringCHANG JEREMY·Filed 2005·Application pending·0 cites
- 1842US2006043067A1Yttria insulator ring for use inside a plasma chamberLAM RES CORP·Filed 2004·Application pending·0 cites
- 1940US2004244685A1Pretreated gas distribution plateLAM RES CORP·Filed 2004·Application pending·0 cites
- 2039US6132513AProcess chemistry resistant manometerLAM RES CORP·Filed 1999·Granted Oct 17, 2000·8 cites·18 claims
- 2138US2004112540A1Uniform etch systemLAM RES CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →