Inventor · disambiguated record
Bart Van Schravendijk
Also filed as: VAN SCHRAVENDIJK BART · VAN SCHRAVENDIJK BART K
12 granted patents·1 pending application·447 citations·filing 2010–2017
94Inventor score
Top patents by PatentIndex Score
13 records- 0198US10043655B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2017·Granted Aug 7, 2018·28 cites·20 claims
- 0298US9570274B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2015·Granted Feb 14, 2017·30 cites·11 claims
- 0398US9070555B2Method for depositing a chlorine-free conformal sin filmNOVELLUS SYSTEMS INC·Filed 2013·Granted Jun 30, 2015·31 cites·19 claims
- 0497US9670579B2Method for depositing a chlorine-free conformal SiN filmNOVELLUS SYSTEMS INC·Filed 2015·Granted Jun 6, 2017·18 cites·20 claims
- 0597US8999859B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2013·Granted Apr 7, 2015·56 cites·25 claims
- 0696US8685867B1Premetal dielectric integration processDANEK MICHAL·Filed 2011·Granted Apr 1, 2014·55 cites·26 claims
- 0796US8592328B2Method for depositing a chlorine-free conformal sin filmHAUSMANN DENNIS·Filed 2012·Granted Nov 26, 2013·111 cites·20 claims
- 0895US9447499B2Dual plenum, axi-symmetric showerhead with edge-to-center gas deliveryROY SHAMBHU N·Filed 2012·Granted Sep 20, 2016·24 cites·19 claims
- 0994US8846536B2Flowable oxide film with tunable wet etch rateDRAEGER NERISSA·Filed 2012·Granted Sep 30, 2014·42 cites·22 claims
- 1094US8728958B2Gap fill integrationASHTIANI KAIHAN·Filed 2010·Granted May 20, 2014·26 cites·23 claims
- 1193US9257302B1CVD flowable gap fillWANG FENG·Filed 2012·Granted Feb 9, 2016·16 cites·17 claims
- 1290US9299559B2Flowable oxide film with tunable wet etch rateNOVELLUS SYSTEMS INC·Filed 2014·Granted Mar 29, 2016·10 cites·14 claims
- 1353US2014302689A1Methods and apparatus for dielectric depositionNOVELLUS SYSTEMS INC·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →