Inventor · disambiguated record
Benjamin Cherian
Also filed as: CHERIAN BENJAMIN · CHERIAN BENJAMIN JACOB
49 granted patents·24 pending applications·147 citations·filing 2012–2025
97Inventor score
Top patents by PatentIndex Score
73 records- 0198US11710228B2Detecting an excursion of a CMP component using time-based sequence of images and machine learningAPPLIED MATERIALS INC·Filed 2022·Granted Jul 25, 2023·5 cites·20 claims
- 0298US10478937B2Acoustic emission monitoring and endpoint for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2015·Granted Nov 19, 2019·21 cites·10 claims
- 0397US11919121B2Control of processing parameters during substrate polishing using constrained cost functionAPPLIED MATERIALS INC·Filed 2022·Granted Mar 5, 2024·3 cites·20 claims
- 0496US11969854B2Control of processing parameters during substrate polishing using expected future parameter changesAPPLIED MATERIALS INC·Filed 2022·Granted Apr 30, 2024·3 cites·19 claims
- 0596US11780047B2Determination of substrate layer thickness with polishing pad wear compensationAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·4 cites·14 claims
- 0695US11931853B2Control of processing parameters for substrate polishing with angularly distributed zones using cost functionAPPLIED MATERIALS INC·Filed 2022·Granted Mar 19, 2024·2 cites·19 claims
- 0794US9490186B2Limiting adjustment of polishing rates during substrate polishingAPPLIED MATERIALS INC·Filed 2013·Granted Nov 8, 2016·15 cites·18 claims
- 0892US8992286B2Weighted regression of thickness maps from spectral dataAPPLIED MATERIALS INC·Filed 2013·Granted Mar 31, 2015·9 cites·20 claims
- 0991US10994389B2Polishing apparatus using neural network for monitoringAPPLIED MATERIALS INC·Filed 2018·Granted May 4, 2021·11 cites·20 claims
- 1091US10969773B2Machine learning systems for monitoring of semiconductor processingAPPLIED MATERIALS INC·Filed 2019·Granted Apr 6, 2021·8 cites·20 claims
- 1190US11731238B2Monitoring of polishing pad texture in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2020·Granted Aug 22, 2023·2 cites·16 claims
- 1289US10795346B2Machine learning systems for monitoring of semiconductor processingYENNIE GRAHAM·Filed 2019·Granted Oct 6, 2020·15 cites·20 claims
- 1389US9242337B2Dynamic residue clearing control with in-situ profile control (ISPC)APPLIED MATERIALS INC·Filed 2014·Granted Jan 26, 2016·8 cites·20 claims
- 1488US9551567B2Reducing noise in spectral data from polishing substratesAPPLIED MATERIALS INC·Filed 2013·Granted Jan 24, 2017·6 cites·19 claims
- 1588US9375824B2Adjustment of polishing rates during substrate polishing with predictive filtersAPPLIED MATERIALS INC·Filed 2013·Granted Jun 28, 2016·7 cites·19 claims
- 1688US9227293B2Multi-platen multi-head polishing architectureAPPLIED MATERIALS INC·Filed 2013·Granted Jan 5, 2016·6 cites·19 claims
- 1787US11865664B2Profile control with multiple instances of contol algorithm during polishingAPPLIED MATERIALS INC·Filed 2021·Granted Jan 9, 2024·1 cites·19 claims
- 1887US11658078B2Using a trained neural network for use in in-situ monitoring during polishing and polishing systemAPPLIED MATERIALS INC·Filed 2021·Granted May 23, 2023·1 cites·17 claims
- 1987US11577356B2Machine vision as input to a CMP process control algorithmAPPLIED MATERIALS INC·Filed 2019·Granted Feb 14, 2023·3 cites·19 claims
- 2086US11850699B2Switching control algorithms on detection of exposure of underlying layer during polishingAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·1 cites·18 claims
- 2186US9833874B2Applying dimensional reduction to spectral data from polishing substratesAPPLIED MATERIALS INC·Filed 2017·Granted Dec 5, 2017·3 cites·15 claims
- 2284US12479062B2Determining substrate orientation with acoustic signalsAPPLIED MATERIALS INC·Filed 2022·Granted Nov 25, 2025·0 cites·20 claims
- 2384US2025319568A1Control of processing parameters for substrate polishing with substrate precessionAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2483US12502748B2Control substrate polishing using constrained cost functionAPPLIED MATERIALS INC·Filed 2023·Granted Dec 23, 2025·0 cites·14 claims
- 2583US12403560B2Determining substrate precession with acoustic signalsAPPLIED MATERIALS INC·Filed 2022·Granted Sep 2, 2025·0 cites·12 claims
- 2683US12148149B2Training a machine learning system to detect an excursion of a CMP component using time-based sequence of imagesAPPLIED MATERIALS INC·Filed 2023·Granted Nov 19, 2024·0 cites·15 claims
- 2783US12136574B2Technique for training neural network for use in in-situ monitoring during polishing and polishing systemAPPLIED MATERIALS INC·Filed 2023·Granted Nov 5, 2024·0 cites·17 claims
- 2883US11507824B2Training spectrum generation for machine learning system for spectrographic monitoringAPPLIED MATERIALS INC·Filed 2019·Granted Nov 22, 2022·2 cites·19 claims
- 2983US10732607B2Spectrographic monitoring using a neural networkAPPLIED MATERIALS INC·Filed 2017·Granted Aug 4, 2020·4 cites·19 claims
- 3083US10086492B2Applying dimensional reduction to spectral data from polishing substratesAPPLIED MATERIALS INC·Filed 2017·Granted Oct 2, 2018·2 cites·12 claims
- 3181US12057354B2Trained neural network in in-situ monitoring during polishing and polishing systemAPPLIED MATERIALS INC·Filed 2023·Granted Aug 6, 2024·0 cites·21 claims
- 3281US2023009737A1Acoustic window in pad backing layer for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3381US2023009519A1Acoustic window in pad polishing and backing layer for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3481US2023011626A1Acoustic window with liquid-filled pores for chemical mechanical polishing and methods of forming padsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3580US2024116152A1Switching control algorithms on detection of exposure of underlying layer during polishingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3678US12257665B2Machine vision as input to a CMP process control algorithmAPPLIED MATERIALS INC·Filed 2023·Granted Mar 25, 2025·0 cites·7 claims
- 3778US12020159B2Training spectrum generation for machine learning system for spectrographic monitoringAPPLIED MATERIALS INC·Filed 2023·Granted Jun 25, 2024·0 cites·12 claims
- 3878US9056383B2Path for probe of spectrographic metrology systemAPPLIED MATERIALS INC·Filed 2013·Granted Jun 16, 2015·3 cites·15 claims
- 3977US12420373B2Control of processing parameters during substrate polishing using cost functionAPPLIED MATERIALS INC·Filed 2022·Granted Sep 23, 2025·0 cites·20 claims
- 4077US12079984B2Detecting an excursion of a CMP component using time-based sequence of imagesAPPLIED MATERIALS INC·Filed 2022·Granted Sep 3, 2024·0 cites·15 claims
- 4175US2025187135A1Machine vision as input to a cmp process control algorithmAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 4274US11791224B2Technique for training neural network for use in in-situ monitoring during polishing and polishing systemAPPLIED MATERIALS INC·Filed 2021·Granted Oct 17, 2023·0 cites·16 claims
- 4373US12343840B2Control of processing parameters for substrate polishing with substrate precessionAPPLIED MATERIALS INC·Filed 2022·Granted Jul 1, 2025·0 cites·17 claims
- 4471US12090599B2Determination of substrate layer thickness with polishing pad wear compensationAPPLIED MATERIALS INC·Filed 2023·Granted Sep 17, 2024·0 cites·13 claims
- 4571US11697187B2Temperature-based assymetry correction during CMP and nozzle for media dispensingAPPLIED MATERIALS INC·Filed 2020·Granted Jul 11, 2023·0 cites·14 claims
- 4671US2023321788A1Monitoring of polishing pad texture in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4770US12440942B2Pressure signals with different frequencies during friction monitoring to provide spatial resolutionAPPLIED MATERIALS INC·Filed 2022·Granted Oct 14, 2025·0 cites·21 claims
- 4870US9221147B2Endpointing with selective spectral monitoringQIAN JUN·Filed 2012·Granted Dec 29, 2015·2 cites·24 claims
- 4969US12447577B2Polishing apparatus using neural network for monitoringAPPLIED MATERIALS INC·Filed 2021·Granted Oct 21, 2025·0 cites·16 claims
- 5069US12311494B2Pressure signals during motor torque monitoring to provide spatial resolutionAPPLIED MATERIALS INC·Filed 2022·Granted May 27, 2025·0 cites·12 claims
Showing the top 50 of 73 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →