Inventor · disambiguated record
Benoit Herve Gaury
Also filed as: GAURY BENOIT HERVE
3 granted patents·4 pending applications·0 citations·filing 2020–2023
39Inventor score
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0159US12494341B2Delay time measurement method and systemASML NETHERLANDS BV·Filed 2023·Granted Dec 9, 2025·0 cites·15 claims
- 0257US2025284209A1Method and system of overlay measurement using charged-particle inspection apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0355US2025385070A1Scanning electron microscopy (sem) back-scattering electron (bse) focused target and methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0452US12092964B2Optically determining electrical contact between metallic features in different layers in a structureASML NETHERLANDS BV·Filed 2020·Granted Sep 17, 2024·0 cites·20 claims
- 0551US2025231129A1E-beam optimization for overlay measurement of buried featuresASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0647US2024427253A1Overlay measurement using balanced capacity targetsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0745US12422757B2Mark to be projected on an object during a lithographic process and method for designing a markASML NETHERLANDS BV·Filed 2023·Granted Sep 23, 2025·0 cites·16 claims
Join the waitlist — get patent alerts
Get an alert when Benoit Herve Gaury files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →