Inventor · disambiguated record

Bernd Henninger

Also filed as: HENNINGER BERND

1 granted patent·3 citations·filing 2010–2010

20Inventor score

Technology areasG01J

Files withZETTLER JOERG-THOMAS1

Top patents by PatentIndex Score

1 record

0158US8388219B2Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting waferZETTLER JOERG-THOMAS·Filed 2010·Granted Mar 5, 2013·3 cites·15 claims

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