Inventor · disambiguated record
Berndt Lahne
Also filed as: LAHNE BERNDT
5 granted patents·181 citations·filing 1993–2003
84Inventor score
Top patents by PatentIndex Score
5 records- 0179US5655869ADevice for coupling loading and unloading devices with semiconductor processing machinesJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Aug 12, 1997·69 cites·11 claims
- 0269US5605428ADevice for indexing magazine compartments and wafer-shaped objects in the compartmentsJENOPTIK JENA GMBH·Filed 1993·Granted Feb 25, 1997·45 cites·2 claims
- 0363US7109509B2Device for the detection of substrates stacked with a specific spacingBROOKS AUTOMATION INC·Filed 2003·Granted Sep 19, 2006·10 cites·10 claims
- 0463US5807062AArrangement for handling wafer-shaped objectsJENOPTIK JENA GMBH·Filed 1996·Granted Sep 15, 1998·34 cites·7 claims
- 0555US5642978ADevice for handling disk-shaped objects in a handling plane of a local clean roomJENOPTIK JENA GMBH·Filed 1996·Granted Jul 1, 1997·23 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →