Inventor · disambiguated record
Benjamin W. Mooring
Also filed as: MOORING BENJAMIN W · MOORING BENJAMIN WAYNE
13 granted patents·1 pending application·323 citations·filing 1999–2019
92Inventor score
Top patents by PatentIndex Score
14 records- 0193US10256124B2Method and system related to semiconductor processing equipmentLAM RES CORP·Filed 2016·Granted Apr 9, 2019·10 cites·45 claims
- 0293US6629053B1Method and apparatus for determining substrate offset using optimization techniquesLAM RES CORP·Filed 2000·Granted Sep 30, 2003·85 cites·31 claims
- 0389US10796940B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2018·Granted Oct 6, 2020·5 cites·34 claims
- 0484US6502054B1Method of and apparatus for dynamic alignment of substratesLAM RES CORP·Filed 1999·Granted Dec 31, 2002·93 cites·29 claims
- 0584US6095741ADual sided slot valve and method for implementing the sameLAM RES CORP·Filed 1999·Granted Aug 1, 2000·77 cites·18 claims
- 0683US10790237B2Fiducial-filtering automatic wafer centering process and associated systemLAM RES CORP·Filed 2018·Granted Sep 29, 2020·4 cites·20 claims
- 0781US8185242B2Dynamic alignment of wafers using compensation values obtained through a series of wafer movementsWONG SCOTT·Filed 2008·Granted May 22, 2012·11 cites·22 claims
- 0880US11581214B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2019·Granted Feb 14, 2023·2 cites·32 claims
- 0975US9117860B2Controlled ambient system for interface engineeringBOYD JOHN·Filed 2006·Granted Aug 25, 2015·5 cites·13 claims
- 1066US10559483B2Platform architecture to improve system productivityLAM RES CORP·Filed 2017·Granted Feb 11, 2020·1 cites·12 claims
- 1165US9293317B2Method and system related to semiconductor processing equipmentMOORING BENJAMIN W·Filed 2012·Granted Mar 22, 2016·2 cites·16 claims
- 1263US6267545B1Semiconductor processing platform architecture having processing module isolation capabilitiesLAM RES CORP·Filed 1999·Granted Jul 31, 2001·28 cites·21 claims
- 1343US7164282B1Methods and apparatus for determining an average electrical response to a conductive layer on a substrateLAM RES CORP·Filed 2005·Granted Jan 16, 2007·0 cites·20 claims
- 1443US2008057182A1Method for gap fill in controlled ambient systemBOYD JOHN·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →