Inventor · disambiguated record
Beat Marco Mout
Also filed as: MOUT BEAT MARCO
2 granted patents·4 citations·filing 2019–2020
46Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0186US11892769B2Method for detecting an object structure and apparatus for carrying out the methodZEISS CARL SMT GMBH·Filed 2020·Granted Feb 6, 2024·2 cites·23 claims
- 0280US11079338B2Method for detecting a structure of a lithography mask and device for carrying out the methodZEISS CARL SMT GMBH·Filed 2019·Granted Aug 3, 2021·2 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →