Inventor · disambiguated record
Benjamin J. Petrone
Also filed as: PETRONE BENJAMIN J
5 granted patents·2 pending applications·822 citations·filing 1986–2004
85Inventor score
Top patents by PatentIndex Score
7 records- 0196US4722298AModular processing apparatus for processing semiconductor wafersMACHINE TECHNOLOGY INC·Filed 1986·Granted Feb 2, 1988·658 cites·15 claims
- 0290US6428847B1Vortex based CVD reactorPRIMAXX INC·Filed 2000·Granted Aug 6, 2002·44 cites·18 claims
- 0388US4852516AModular processing apparatus for processing semiconductor wafersMACHINE TECHNOLOGY INC·Filed 1987·Granted Aug 1, 1989·100 cites·23 claims
- 0462US7771563B2Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systemsSUMITOMO PRECISION PROD CO·Filed 2004·Granted Aug 10, 2010·9 cites·24 claims
- 0559US6391804B1Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactorPRIMAXX INC·Filed 2000·Granted May 21, 2002·11 cites·11 claims
- 0643US2002195055A1Vortex based CVD reactorFiled 2002·Application pending·0 cites
- 0739US2004028810A1Chemical vapor deposition reactor and method for utilizing vapor vortexPRIMAXX INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →