Inventor · disambiguated record
Beomjin Yoo
Also filed as: YOO BEOMJIN
3 granted patents·2 pending applications·4 citations·filing 2018–2020
56Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
5 records- 0188US11798788B2Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 24, 2023·2 cites·20 claims
- 0275US10950414B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Mar 16, 2021·2 cites·14 claims
- 0349US2019122867A1Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 0437US10998185B2Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted May 4, 2021·0 cites·13 claims
- 0537US2019096636A1Plasma processing apparatus, plasma processing method and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →