Inventor · disambiguated record
Binet Worsham
Also filed as: WORSHAM BINET · WORSHAM BINET A
5 granted patents·50 citations·filing 2004–2007
79Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0193US7307025B1Lag controlLAM RES CORP·Filed 2005·Granted Dec 11, 2007·26 cites·15 claims
- 0274US7789991B1Lag controlLAM RES CORP·Filed 2007·Granted Sep 7, 2010·4 cites·6 claims
- 0370US7442649B2Etch with photoresist maskLAM RES CORP·Filed 2005·Granted Oct 28, 2008·3 cites·12 claims
- 0462US7078350B2Methods for the optimization of substrate etching in a plasma processing systemLAM RES CORP·Filed 2004·Granted Jul 18, 2006·11 cites·35 claims
- 0559US6979579B1Methods and apparatus for inspecting contact openings in a plasma processing systemLAM RES CORP·Filed 2004·Granted Dec 27, 2005·6 cites·40 claims
Join the waitlist — get patent alerts
Get an alert when Binet Worsham files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →