Inventor · disambiguated record
Boxiu Cai
Also filed as: CAI BOXIU
14 granted patents·16 citations·filing 2013–2017
86Inventor score
Files withSEMICONDUCTOR MFG INT SHANGHAI5SEMICONDUCTOR MFG INT SHANGHAI CORP5CAI BOXIU2ALPHA & OMEGA SEMICONDUCTOR1SEMICONDUCTOR MFG INTERNATIONAL (SHANGHAI) CORPORATION1
Top patents by PatentIndex Score
14 records- 0189US9316925B2Methods for monitoring source symmetry of photolithography systemsSEMICONDUCTOR MFG INT SHANGHAI·Filed 2013·Granted Apr 19, 2016·7 cites·20 claims
- 0278US10163806B2Photolithography alignment mark structures and semiconductor structuresSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2017·Granted Dec 25, 2018·2 cites·15 claims
- 0376US9620458B2Photolithography alignment mark structures, semiconductor structures, and fabrication method thereofSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted Apr 11, 2017·2 cites·12 claims
- 0472US9679822B1Method for monitoring epitaxial growth geometry shiftALPHA & OMEGA SEMICONDUCTOR·Filed 2016·Granted Jun 13, 2017·2 cites·19 claims
- 0568US8742345B1Method for detecting electron beam of scanning electron microscope and for detecting fine patternsSEMICONDUCTOR MFG INT SHANGHAI·Filed 2013·Granted Jun 3, 2014·2 cites·16 claims
- 0662US9105079B2Method and system for obtaining optical proximity correction model calibration dataSEMICONDUCTOR MFG INT SHANGHAI·Filed 2014·Granted Aug 11, 2015·1 cites·20 claims
- 0759US9946155B2Photolithographic maskSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2017·Granted Apr 17, 2018·0 cites·12 claims
- 0853US9257287B2Laser annealing device and methodSEMICONDUCTOR MFG INT SHANGHAI·Filed 2013·Granted Feb 9, 2016·0 cites·8 claims
- 0951US9829788B2Photolithographic mask and fabrication method thereofSEMICONDUCTOR MFG INTERNATIONAL (SHANGHAI) CORPORATION·Filed 2015·Granted Nov 28, 2017·0 cites·15 claims
- 1050US9406515B2Laser annealing device including tunable mask and method of using the sameSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted Aug 2, 2016·0 cites·8 claims
- 1150US9348215B2Photolithographic masks and fabrication method thereofSEMICONDUCTOR MFG INT SHANGHAI·Filed 2013·Granted May 24, 2016·0 cites·20 claims
- 1245US9645096B2Method and system for optical measurementsSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted May 9, 2017·0 cites·18 claims
- 1344US8829424B2Method and apparatus for monitoring electron beam condition of scanning electron microscopeCAI BOXIU·Filed 2013·Granted Sep 9, 2014·0 cites·20 claims
- 1432US9019152B2Standard wafer and its fabrication methodCAI BOXIU·Filed 2013·Granted Apr 28, 2015·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →