Inventor · disambiguated record
Bret W. Adams
Also filed as: ADAMS BRET · ADAMS BRET W
15 granted patents·1 pending application·489 citations·filing 1997–2011
95Inventor score
Top patents by PatentIndex Score
16 records- 0195US6939198B1Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2002·Granted Sep 6, 2005·70 cites·32 claims
- 0293US7294039B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2006·Granted Nov 13, 2007·15 cites·4 claims
- 0393US7101251B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2005·Granted Sep 5, 2006·15 cites·8 claims
- 0492US6110011AIntegrated electrodeposition and chemical-mechanical polishing toolAPPLIED MATERIALS INC·Filed 1997·Granted Aug 29, 2000·115 cites·17 claims
- 0591US6352467B1Integrated electrodeposition and chemical mechanical polishing toolAPPLIED MATERIALS INC·Filed 2000·Granted Mar 5, 2002·48 cites·15 claims
- 0688US6390908B1Determining when to replace a retaining ring used in substrate polishing operationsAPPLIED MATERIALS INC·Filed 1999·Granted May 21, 2002·77 cites·25 claims
- 0787US6506097B1Optical monitoring in a two-step chemical mechanical polishing processAPPLIED MATERIALS INC·Filed 2001·Granted Jan 14, 2003·36 cites·20 claims
- 0887US6013159AParticle trap in a magnetron sputtering chamberAPPLIED MATERIALS INC·Filed 1997·Granted Jan 11, 2000·52 cites·17 claims
- 0986US7927182B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2009·Granted Apr 19, 2011·6 cites·4 claims
- 1080US7585202B2Computer-implemented method for process control in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2007·Granted Sep 8, 2009·4 cites·8 claims
- 1177US8460057B2Computer-implemented process control in chemical mechanical polishingSWEDEK BOGUSLAW A·Filed 2011·Granted Jun 11, 2013·2 cites·13 claims
- 1276US6632124B2Optical monitoring in a two-step chemical mechanical polishing processAPPLIED MATERIALS INC·Filed 2003·Granted Oct 14, 2003·17 cites·14 claims
- 1367US7619229B2Technique for matching performance of ion implantation devices using an in-situ maskVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Nov 17, 2009·2 cites·18 claims
- 1466US6045670ABack sputtering shieldAPPLIED MATERIALS INC·Filed 1997·Granted Apr 4, 2000·20 cites·28 claims
- 1544US6000415AMethod and apparatus for positioning a restrictor shield of a pump in response to an electric signalAPPLIED MATERIALS INC·Filed 1997·Granted Dec 14, 1999·10 cites·16 claims
- 1640US2006240651A1Methods and apparatus for adjusting ion implant parameters for improved process controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →