Inventor · disambiguated record
Bruce E. Adams
Also filed as: ADAMS BRUCE · ADAMS BRUCE E
76 granted patents·18 pending applications·1,387 citations·filing 1978–2024
99Inventor score
Top patents by PatentIndex Score
94 records- 0198US7279721B2Dual wavelength thermal flux laser annealAPPLIED MATERIALS INC·Filed 2005·Granted Oct 9, 2007·46 cites·21 claims
- 0297US8148663B2Apparatus and method of improving beam shaping and beam homogenizationADAMS BRUCE E·Filed 2007·Granted Apr 3, 2012·45 cites·14 claims
- 0397US7135392B1Thermal flux laser annealing for ion implantation of semiconductor P-N junctionsAPPLIED MATERIALS INC·Filed 2005·Granted Nov 14, 2006·50 cites·10 claims
- 0496US8222574B2Temperature measurement and control of wafer support in thermal processing chamberSORABJI KHURSHED·Filed 2008·Granted Jul 17, 2012·62 cites·19 claims
- 0596US7595208B2Method of laser annealing using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2007·Granted Sep 29, 2009·22 cites·20 claims
- 0695US8829392B2Apparatus and method of improving beam shaping and beam homogenizationADAMS BRUCE E·Filed 2012·Granted Sep 9, 2014·15 cites·11 claims
- 0795US7860379B2Temperature measurement and control of wafer support in thermal processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Dec 28, 2010·27 cites·4 claims
- 0894US7494272B2Dynamic surface annealing using addressable laser array with pyrometry feedbackAPPLIED MATERIALS INC·Filed 2006·Granted Feb 24, 2009·26 cites·12 claims
- 0994US7129440B2Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodesAPPLIED MATERIALS INC·Filed 2005·Granted Oct 31, 2006·26 cites·17 claims
- 1094US5154512ANon-contact techniques for measuring temperature or radiation-heated objectsLUXTRON CORP·Filed 1990·Granted Oct 13, 1992·119 cites·32 claims
- 1192US5490728ANon-contact optical techniques for measuring surface conditionsLUXTRON CORP·Filed 1994·Granted Feb 13, 1996·96 cites·56 claims
- 1292US5183338ATemperature measurement with combined photo-luminescent and black body sensing techniquesLUXTRON CORP·Filed 1991·Granted Feb 2, 1993·104 cites·6 claims
- 1391US10234772B2Overlay error correctionAPPLIED MATERIALS INC·Filed 2017·Granted Mar 19, 2019·5 cites·7 claims
- 1490US9908200B2Apparatus and method of improving beam shaping and beam homogenizationAPPLIED MATERIALS INC·Filed 2014·Granted Mar 6, 2018·6 cites·20 claims
- 1590US8367983B2Apparatus including heating source reflective filter for pyrometryAPPLIED MATERIALS INC·Filed 2009·Granted Feb 5, 2013·14 cites·20 claims
- 1690US7398693B2Adaptive control method for rapid thermal processing of a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Jul 15, 2008·19 cites·33 claims
- 1790US6839507B2Black reflector plateAPPLIED MATERIALS INC·Filed 2002·Granted Jan 4, 2005·61 cites·27 claims
- 1890US5364186AApparatus and method for monitoring a temperature using a thermally fused composite ceramic blackbody temperature probeLUXTRON CORP·Filed 1992·Granted Nov 15, 1994·97 cites·5 claims
- 1990US5166080ATechniques for measuring the thickness of a film formed on a substrateLUXTRON CORP·Filed 1991·Granted Nov 24, 1992·90 cites·28 claims
- 2089US10857623B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2017·Granted Dec 8, 2020·2 cites·20 claims
- 2189US7772134B2Method of annealing using two wavelengths of continuous wave laser radiationAPPLIED MATERIALS INC·Filed 2009·Granted Aug 10, 2010·7 cites·18 claims
- 2288US8242407B2Annealing apparatus using two wavelengths of continuous wave laser radiationJENNINGS DEAN·Filed 2010·Granted Aug 14, 2012·5 cites·20 claims
- 2388US7978964B2Substrate processing chamber with dielectric barrier discharge lamp assemblyAPPLIED MATERIALS INC·Filed 2006·Granted Jul 12, 2011·12 cites·23 claims
- 2488US6406179B2Sensor for measuring a substrate temperatureAPPLIED MATERIALS INC·Filed 2001·Granted Jun 18, 2002·35 cites·8 claims
- 2588US5769540ANon-contact optical techniques for measuring surface conditionsLUXTRON CORP·Filed 1994·Granted Jun 23, 1998·84 cites·33 claims
- 2687US9839976B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·3 cites·13 claims
- 2787US8147137B2Pyrometry for substrate processingPATALAY KAILASH KIRAN·Filed 2008·Granted Apr 3, 2012·12 cites·25 claims
- 2885US8907247B2Annealing apparatus using two wavelengths of laser radiationJENNINGS DEAN·Filed 2012·Granted Dec 9, 2014·3 cites·17 claims
- 2985US7598150B2Compensation techniques for substrate heating processesAPPLIED MATERIALS INC·Filed 2006·Granted Oct 6, 2009·8 cites·21 claims
- 3085US6183130B1Apparatus for substrate temperature measurement using a reflecting cavity and detectorAPPLIED MATERIALS INC·Filed 1998·Granted Feb 6, 2001·71 cites·28 claims
- 3184US7795816B2High speed phase scrambling of a coherent beam using plasmaAPPLIED MATERIALS INC·Filed 2007·Granted Sep 14, 2010·8 cites·17 claims
- 3284US5310260ANon-contact optical techniques for measuring surface conditionsLUXTRON CORP·Filed 1992·Granted May 10, 1994·57 cites·33 claims
- 3381US9579750B2Particle control in laser processing systemsHUNTER AARON MUIR·Filed 2012·Granted Feb 28, 2017·6 cites·19 claims
- 3481US8582962B2Substrate processing chamber with dielectric barrier discharge lamp assemblyRANISH JOSEPH MICHAEL·Filed 2011·Granted Nov 12, 2013·6 cites·19 claims
- 3579US5318362ANon-contact techniques for measuring temperature of radiation-heated objectsLUXTRON CORP·Filed 1992·Granted Jun 7, 1994·42 cites·31 claims
- 3678US11280686B2Temperature measurement using etalonsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·1 cites·19 claims
- 3778US8785815B2Aperture control of thermal processing radiationSADE AMIKAM·Filed 2012·Granted Jul 22, 2014·4 cites·18 claims
- 3877US11945045B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2020·Granted Apr 2, 2024·0 cites·19 claims
- 3976US7422988B2Rapid detection of imminent failure in laser thermal processing of a substrateAPPLIED MATERIALS INC·Filed 2005·Granted Sep 9, 2008·4 cites·10 claims
- 4074US10147623B2Pyrometry filter for thermal process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Dec 4, 2018·1 cites·17 claims
- 4174US9786529B2Pyrometry filter for thermal process chamberAPPLIED MATERIALS INC·Filed 2014·Granted Oct 10, 2017·2 cites·20 claims
- 4274US8970963B2Multiple beam combiner for laser processing apparatusMOFFATT STEPHEN·Filed 2012·Granted Mar 3, 2015·2 cites·6 claims
- 4374US8363320B2Method and apparatus for decorrelation of spatially and temporally coherent lightAPPLIED MATERIALS INC·Filed 2011·Granted Jan 29, 2013·2 cites·20 claims
- 4474US8247317B2Methods of solid phase recrystallization of thin film using pulse train annealing methodMOFFATT STEPHEN·Filed 2010·Granted Aug 21, 2012·3 cites·8 claims
- 4574US7804042B2Pryometer for laser annealing system compatible with amorphous carbon optical absorber layerAPPLIED MATERIALS INC·Filed 2007·Granted Sep 28, 2010·3 cites·10 claims
- 4672US5112137ATemperature measurement with combined photo-luminescent and black body sensing techniquesLUXTRON CORP·Filed 1991·Granted May 12, 1992·39 cites·32 claims
- 4771US8569187B2Thermal processing apparatusMOFFATT STEPHEN·Filed 2011·Granted Oct 29, 2013·2 cites·18 claims
- 4871US2024385048A1Etalon thermometry for plasma environmentsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4970US9864280B2Overlay error correctionAPPLIED MATERIALS INC·Filed 2015·Granted Jan 9, 2018·1 cites·16 claims
- 5070US7906402B2Compensation techniques for substrate heating processesAPPLIED MATERIALS INC·Filed 2009·Granted Mar 15, 2011·2 cites·20 claims
Showing the top 50 of 94 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →