Inventor · disambiguated record
Bruce Mcarthur
Also filed as: MCARTHUR BRUCE · MCARTHUR BRUCE B
34 granted patents·1 pending application·1,592 citations·filing 1993–2007
98Inventor score
Top patents by PatentIndex Score
35 records- 0197US5978085AApparatus method of measurement and method of data analysis for correction of optical systemLITEL INSTR INC·Filed 1997·Granted Nov 2, 1999·189 cites·19 claims
- 0297US5828455AApparatus, method of measurement, and method of data analysis for correction of optical systemLITEL INSTR INC·Filed 1997·Granted Oct 27, 1998·204 cites·9 claims
- 0396US5523543ALaser ablation control system and methodLITEL INSTR INC·Filed 1994·Granted Jun 4, 1996·155 cites·18 claims
- 0495US6699627B2Reference wafer and process for manufacturing sameFiled 2001·Granted Mar 2, 2004·56 cites·27 claims
- 0595US6573986B2Method and apparatus for self-referenced projection lens distortion mappingLITEL INSTR INC·Filed 2001·Granted Jun 3, 2003·61 cites·43 claims
- 0695US6130009AApparatus and process for nozzle production utilizing computer generated hologramsLITEL INSTR INC·Filed 1994·Granted Oct 10, 2000·95 cites·15 claims
- 0793US6356345B1In-situ source metrology instrument and method of useLITEL INSTR INC·Filed 1999·Granted Mar 12, 2002·72 cites·22 claims
- 0892US6734971B2Method and apparatus for self-referenced wafer stage positional error mappingLAEL INSTR·Filed 2001·Granted May 11, 2004·54 cites·45 claims
- 0990US5633735AUse of fresnel zone plates for material processingLITEL INSTR INC·Filed 1994·Granted May 27, 1997·62 cites·46 claims
- 1089US5392119APlate correction of imaging systemsLITEL INSTR INC·Filed 1993·Granted Feb 21, 1995·89 cites·30 claims
- 1188US5509553ADirect etch processes for the manufacture of high density multichip modulesLITEL INSTR INC·Filed 1994·Granted Apr 23, 1996·85 cites·50 claims
- 1288US5364493AApparatus and process for the production of fine line metal tracesLITEL INSTR INC·Filed 1993·Granted Nov 15, 1994·67 cites·23 claims
- 1387US7136144B2Method and apparatus for self-referenced dynamic step and scan intra-field lens distortionLITEL INSTR INC·Filed 2005·Granted Nov 14, 2006·9 cites·15 claims
- 1485US7271905B2Method and apparatus for self-referenced wafer stage positional error mappingLITEL INSTR INC·Filed 2004·Granted Sep 18, 2007·19 cites·5 claims
- 1583US7099011B2Method and apparatus for self-referenced projection lens distortion mappingLITEL INSTR INC·Filed 2003·Granted Aug 29, 2006·21 cites·27 claims
- 1683US5481407AApparatus and process for using Fresnel zone plate array for processing materialsLITEL INSTR INC·Filed 1993·Granted Jan 2, 1996·44 cites·31 claims
- 1782US7268360B2Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortionLITEL INSTR INC·Filed 2005·Granted Sep 11, 2007·9 cites·21 claims
- 1882US6741338B2In-situ source metrology instrument and method of useLITEL INSTR INC·Filed 2001·Granted May 25, 2004·21 cites·15 claims
- 1982US5539175AApparatus and process for optically ablated openings having designed profileLITEL INSTR INC·Filed 1994·Granted Jul 23, 1996·42 cites·19 claims
- 2081US7871004B2Method and apparatus for self-referenced wafer stage positional error mappingLITEL INSTR INC·Filed 2007·Granted Jan 18, 2011·4 cites·4 claims
- 2179US7871002B2Method and apparatus for self-referenced wafer stage positional error mappingLITEL INSTR INC·Filed 2006·Granted Jan 18, 2011·5 cites·24 claims
- 2277US6899982B2Method and apparatus for proper ordering of registration dataLITEL INSTR INC·Filed 2004·Granted May 31, 2005·12 cites·17 claims
- 2374US5501925AHigh power masks and methods for manufacturing sameLITEL INSTR INC·Filed 1994·Granted Mar 26, 1996·27 cites·11 claims
- 2472US5571429AApparatus and process for high speed laminate processing with computer generated hologramsLITEL INSTR INC·Filed 1994·Granted Nov 5, 1996·33 cites·18 claims
- 2570US7160657B2Reference wafer and process for manufacturing sameLITEL INSTR INC·Filed 2004·Granted Jan 9, 2007·20 cites·12 claims
- 2665US5538817AGray level imaging masks and methods for encoding sameLITEL INSTR INC·Filed 1994·Granted Jul 23, 1996·22 cites·17 claims
- 2763US5702662AProcess for ablating high density vias in flexible substrateLITEL INSTR INC·Filed 1995·Granted Dec 30, 1997·26 cites·6 claims
- 2863US5660738ADirect etch processes for the manufacture of high density modulesLITEL INSTR INC·Filed 1996·Granted Aug 26, 1997·24 cites·56 claims
- 2962US7088427B2Apparatus and method for high resolution in-situ illumination source measurement in projection imaging systemsLITEL INSTR INC·Filed 2004·Granted Aug 8, 2006·6 cites·18 claims
- 3061US5640233APlate correction technique for imaging systemsLITEL INSTR INC·Filed 1996·Granted Jun 17, 1997·25 cites·19 claims
- 3155US7337552B2Method and apparatus for registration with integral alignment opticsLITEL INSTR INC·Filed 2004·Granted Mar 4, 2008·4 cites·22 claims
- 3255US5929991ASingle plate corrector for stepper lens trainLITEL INSTR INC·Filed 1997·Granted Jul 27, 1999·18 cites·6 claims
- 3348US6833221B2Method and apparatus for proper ordering of registration dataLITEL INSTR INC·Filed 2002·Granted Dec 21, 2004·6 cites·35 claims
- 3441US2003202174A1Method and apparatus for self-referenced projection lens distortion mappingFiled 2003·Application pending·0 cites
- 3538US6208439B1Generalized geometric transforms for computer generated hologramsLITEL INSTR INC·Filed 1993·Granted Mar 27, 2001·6 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →