Inventor · disambiguated record
Bubesh Babu Jotheeswaran
Also filed as: JOTHEESWARAN BUBESH BABU
2 granted patents·6 pending applications·0 citations·filing 2013–2024
23Inventor score
Top patents by PatentIndex Score
8 records- 0167US2024429038A1Semiconductor processing preclean methods and apparatusASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0263US2022367175A1Apparatus and method for removal of oxide and carbon from semiconductor films in a single processing chamberASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0357US12112938B2Semiconductor processing preclean methods and apparatusASM IP HOLDING BV·Filed 2022·Granted Oct 8, 2024·0 cites·11 claims
- 0454US2025034714A1Reflectors, semiconductor processing systems having reflectors, and methods of depositing material layers in semiconductor processing systems using reflectorsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0549US2019019670A1Apparatus and method for removal of oxide and carbon from semiconductor films in a single processing chamberASM IP HOLDING BV·Filed 2018·Application pending·0 cites
- 0649US2023324227A1Pyrometer controlled multi-wafer cleaning processASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0747US2014284404A1Chemical vapour deposition injectorASM TECH SINGAPORE PTE LTD·Filed 2013·Application pending·0 cites
- 0836US12272527B2Apparatus for use with hydrogen radicals and method of using sameASM IP HOLDING BV·Filed 2018·Granted Apr 8, 2025·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →