Inventor · disambiguated record
Byeongpil Park
Also filed as: PARK BYEONGPIL
2 granted patents·2 pending applications·7 citations·filing 2019–2024
49Inventor score
Technology areasH10P
Files withASM IP HOLDING BV4
Top patents by PatentIndex Score
4 records- 0168US12506021B2Substrate processing apparatusASM IP HOLDING BV·Filed 2022·Granted Dec 23, 2025·0 cites·18 claims
- 0256USD949319SExhaust ductASM IP HOLDING BV·Filed 2019·Granted Apr 19, 2022·7 cites·1 claims
- 0353US2024287679A1Wafer processing apparatus with film uniformity improvement capabilitiesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0452US2023323558A1Substrate processing apparatus and method of fabricating the sameASM IP HOLDING BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →