Inventor · disambiguated record
C. Robert Koemtzopoulos
Also filed as: KOEMTZOPOULOS C ROBERT
11 granted patents·643 citations·filing 1996–2009
92Inventor score
Files withLAM RES CORP11
Top patents by PatentIndex Score
11 records- 0197US6017414AMethod of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambersLAM RES CORP·Filed 1997·Granted Jan 25, 2000·186 cites·39 claims
- 0294US6303044B1Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambersLAM RES CORP·Filed 1999·Granted Oct 16, 2001·186 cites·21 claims
- 0393US6071573AProcess for precoating plasma CVD reactorsLAM RES CORP·Filed 1997·Granted Jun 6, 2000·132 cites·17 claims
- 0486US6016766AMicrowave plasma processorLAM RES CORP·Filed 1997·Granted Jan 25, 2000·54 cites·16 claims
- 0576US5911833AMethod of in-situ cleaning of a chuck within a plasma chamberLAM RES CORP·Filed 1997·Granted Jun 15, 1999·49 cites·17 claims
- 0673US5988187AChemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection portsLAM RES CORP·Filed 1996·Granted Nov 23, 1999·22 cites·20 claims
- 0767US7951616B2Process for wafer temperature verification in etch toolsLAM RES CORP·Filed 2009·Granted May 31, 2011·2 cites·16 claims
- 0857US7682985B2Dual doped polysilicon and silicon germanium etchLAM RES CORP·Filed 2004·Granted Mar 23, 2010·7 cites·14 claims
- 0954US7425277B1Method for hard mask CD trimLAM RES CORP·Filed 2003·Granted Sep 16, 2008·4 cites·17 claims
- 1054USRE38097EChemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection portsLAM RES CORP·Filed 2001·Granted Apr 29, 2003·1 cites·20 claims
- 1152US7667281B2Method for hard mask CD trimLAM RES CORP·Filed 2007·Granted Feb 23, 2010·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →