Inventor · disambiguated record
Caiz Hong Tian
Also filed as: TIAN CAIZ HONG
3 granted patents·357 citations·filing 2004–2004
75Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0197US7138767B2Surface wave plasma processing system and method of usingTOKYO ELECTRON LTD·Filed 2004·Granted Nov 21, 2006·342 cites·26 claims
- 0267US7584714B2Method and system for improving coupling between a surface wave plasma source and a plasma spaceTOKYO ELECTRON LTD·Filed 2004·Granted Sep 8, 2009·7 cites·30 claims
- 0359US7268084B2Method for treating a substrateTOKYO ELECTRON LTD·Filed 2004·Granted Sep 11, 2007·8 cites·38 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →