Inventor · disambiguated record
Cao Zhang
Also filed as: ZHANG CAO · ZHANG CAO H
3 granted patents·22 citations·filing 1990–2023
62Inventor score
Top patents by PatentIndex Score
3 records- 0189US11966156B2Lithography mask repair by simulation of photoresist thickness evolutionKLA CORP·Filed 2023·Granted Apr 23, 2024·3 cites·31 claims
- 0254US12406197B2Prediction and metrology of stochastic photoresist thickness defectsKLA CORP·Filed 2021·Granted Sep 2, 2025·0 cites·19 claims
- 0340US5073915ADensitometer for the on-line concentration measurement of rare earth metals and methodBEIJING INST OF NUCLEAR ENGINE·Filed 1990·Granted Dec 17, 1991·19 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →