Inventor · disambiguated record
Christof Baur
Also filed as: BAUR CHRISTOF
37 granted patents·4 pending applications·313 citations·filing 2002–2025
97Inventor score
Top patents by PatentIndex Score
41 records- 0195US7319336B2Charged particle beam device probe operationZYVEX INSTR LLC·Filed 2005·Granted Jan 15, 2008·63 cites·19 claims
- 0294US7196454B2Positioning device for microscopic motionZYVEX CORP·Filed 2005·Granted Mar 27, 2007·72 cites·20 claims
- 0393US7326293B2Patterned atomic layer epitaxyZYVEX LABS LLC·Filed 2005·Granted Feb 5, 2008·27 cites·26 claims
- 0492US11630124B2Device and method for operating a bending beam in a closed control loopZEISS CARL SMT GMBH·Filed 2021·Granted Apr 18, 2023·3 cites·21 claims
- 0589US11965910B2Device and method for operating a bending beam in a closed control loopZEISS CARL SMT GMBH·Filed 2023·Granted Apr 23, 2024·1 cites·30 claims
- 0687US7675300B2Charged particle beam device probe operationZYVEX INSTR LLC·Filed 2007·Granted Mar 9, 2010·12 cites·27 claims
- 0787US7285778B2Probe current imagingZYVEX CORP·Filed 2005·Granted Oct 23, 2007·8 cites·20 claims
- 0885US11237187B2Method and apparatus for examining a measuring tip of a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2020·Granted Feb 1, 2022·2 cites·21 claims
- 0985US6812460B1Nano-manipulation by gyrationZYVEX CORP·Filed 2003·Granted Nov 2, 2004·36 cites·20 claims
- 1085US2025362321A1Device and method for operating a bending beam in a closed control loopZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1184US9336983B2Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscopeZEISS CARL SMT GMBH·Filed 2015·Granted May 10, 2016·8 cites·20 claims
- 1282US11429020B2Method and apparatus for removing a particle from a photolithographic maskZEISS CARL SMT GMBH·Filed 2020·Granted Aug 30, 2022·1 cites·20 claims
- 1381US11237185B2Apparatus and method for a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2019·Granted Feb 1, 2022·1 cites·18 claims
- 1480US12405289B2Device and method for operating a bending beam in a closed control loopZEISS CARL SMT GMBH·Filed 2024·Granted Sep 2, 2025·0 cites·17 claims
- 1580US12292680B2Method and apparatuses for disposing of excess material of a photolithographic maskZEISS CARL SMT GMBH·Filed 2022·Granted May 6, 2025·0 cites·17 claims
- 1679US12164226B2Method and apparatuses for disposing of excess material of a photolithographic maskZEISS CARL SMT GMBH·Filed 2022·Granted Dec 10, 2024·0 cites·41 claims
- 1779US8769709B2Apparatus and method for analyzing and modifying a specimen surfaceZEISS CARL SMS GMBH·Filed 2013·Granted Jul 1, 2014·4 cites·20 claims
- 1878US9995764B2Method and apparatus for avoiding damage when analysing a sample surface with a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2017·Granted Jun 12, 2018·2 cites·24 claims
- 1978US6608307B1System and method for accurate positioning of a scanning probe microscopeZYVEX CORP·Filed 2002·Granted Aug 19, 2003·40 cites·23 claims
- 2076US11592461B2Apparatus and method for examining and/or processing a sampleZEISS CARL SMT GMBH·Filed 2022·Granted Feb 28, 2023·0 cites·20 claims
- 2176US2024272198A1Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 2275US11899359B2Method and apparatus for removing a particle from a photolithographic maskZEISS CARL SMT GMBH·Filed 2022·Granted Feb 13, 2024·0 cites·16 claims
- 2375US10983075B2Device and method for analysing a defect of a photolithographic mask or of a waferZEISS CARL SMT GMBH·Filed 2017·Granted Apr 20, 2021·1 cites·11 claims
- 2473US11886126B2Apparatus and method for removing a single particulate from a substrateZEISS CARL SMT GMBH·Filed 2021·Granted Jan 30, 2024·1 cites·39 claims
- 2572US11977097B2Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2022·Granted May 7, 2024·0 cites·31 claims
- 2672US10578644B2Probe system and method for receiving a probe of a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2017·Granted Mar 3, 2020·1 cites·24 claims
- 2772US9115981B2Apparatus and method for investigating an objectZEISS CARL SMS GMBH·Filed 2013·Granted Aug 25, 2015·3 cites·25 claims
- 2870US11733186B2Device and method for analyzing a defect of a photolithographic mask or of a waferZEISS CARL SMT GMBH·Filed 2021·Granted Aug 22, 2023·0 cites·32 claims
- 2970US6987277B2Systems and method for picking and placing of nanoscale objects utilizing differences in chemical and physical binding forcesZYVEX CORP·Filed 2003·Granted Jan 17, 2006·26 cites·23 claims
- 3069US11874598B2Method and apparatuses for disposing of excess material of a photolithographic maskZEISS CARL SMT GMBH·Filed 2019·Granted Jan 16, 2024·0 cites·15 claims
- 3169US11796563B2Apparatus and method for a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2022·Granted Oct 24, 2023·0 cites·20 claims
- 3269US11353478B2Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2019·Granted Jun 7, 2022·0 cites·28 claims
- 3369US7799132B2Patterned atomic layer epitaxyZYVEX LABS LLC·Filed 2007·Granted Sep 21, 2010·1 cites·31 claims
- 3469US2025147412A1Method for examining a blank of a microlithographic photomaskZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 3568US11680963B2Method and apparatus for examining a measuring tip of a scanning probe microscopeZEISS CARL SMT GMBH·Filed 2021·Granted Jun 20, 2023·0 cites·21 claims
- 3667US11262378B2Apparatus and method for examining and/or processing a sampleZEISS CARL SMT GMBH·Filed 2020·Granted Mar 1, 2022·0 cites·12 claims
- 3760US11054439B2Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan modeZEISS CARL SMT GMBH·Filed 2019·Granted Jul 6, 2021·0 cites·27 claims
- 3856US12493238B2Method, device and computer program for repairing a mask defectZEISS CARL SMT GMBH·Filed 2022·Granted Dec 9, 2025·0 cites·32 claims
- 3953US2023152089A1Method and device for determining an alignment of a photomask on a sample stage which is displaceable along at least one axis and rotatable about at least one axisZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 4044US10410820B2Beam blanker and method for blanking a charged particle beamZEISS CARL SMT GMBH·Filed 2017·Granted Sep 10, 2019·0 cites·21 claims
- 4137US10119990B2Scanning probe microscope and method for examining a surface with a high aspect ratioZEISS CARL SMT GMBH·Filed 2016·Granted Nov 6, 2018·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →