Inventor · disambiguated record
Christopher A. Bode
Also filed as: BODE CHRISTOPHER · BODE CHRISTOPHER A · BODE CHRISTOPHER ALLEN
65 granted patents·2 pending applications·2,153 citations·filing 1999–2021
99Inventor score
Files withADVANCED MICRO DEVICES INC58ADAVANCED MICRO DEVICES INC1AMD INC1COSS JR ELFIDO1MARKLE RICHARD J1
Top patents by PatentIndex Score
67 records- 0199US6746308B1Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 8, 2004·410 cites·10 claims
- 0296US6708075B2Method and apparatus for utilizing integrated metrology data as feed-forward dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 16, 2004·103 cites·22 claims
- 0395US6751518B1Dynamic process state adjustment of a processing tool to reduce non-uniformityADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 15, 2004·85 cites·34 claims
- 0494US6410351B1Method and apparatus for modeling thickness profiles and controlling subsequent etch processADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 25, 2002·78 cites·18 claims
- 0593US6368883B1Method for identifying and controlling impact of ambient conditions on photolithography processesADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 9, 2002·117 cites·33 claims
- 0692US7445945B1Method and apparatus for dynamic adjustment of a sampling plan based on wafer electrical test dataADVANCED MICRO DEVICES INC·Filed 2005·Granted Nov 4, 2008·18 cites·16 claims
- 0790US6405096B1Method and apparatus for run-to-run controlling of overlay registrationADVANCED MICRO DEVICES INC·Filed 1999·Granted Jun 11, 2002·93 cites·39 claims
- 0889US6778873B1Identifying a cause of a fault based on a process controller outputADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 17, 2004·56 cites·27 claims
- 0989US6248602B1Method and apparatus for automated rework within run-to-run control semiconductor manufacturingAMD INC·Filed 1999·Granted Jun 19, 2001·102 cites·42 claims
- 1088US7558687B1Method and apparatus for dynamic adjustment of a sensor sampling rateADVANCED MICRO DEVICES INC·Filed 2004·Granted Jul 7, 2009·46 cites·24 claims
- 1188US6947803B1Dispatch and/or disposition of material based upon an expected parameter resultADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 20, 2005·41 cites·38 claims
- 1288US6650955B1Method and apparatus for determining a sampling plan based on process and equipment fingerprintingADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 18, 2003·47 cites·37 claims
- 1388US6610550B1Method and apparatus for correlating error model with defect dataADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 26, 2003·51 cites·9 claims
- 1487US8321048B1Associating data with workpieces and correlating the data with yield dataCOSS JR ELFIDO·Filed 2002·Granted Nov 27, 2012·40 cites·21 claims
- 1586US6741903B1Method for relating photolithography overlay target damage and chemical mechanical planarization (CMP) fault detection to CMP tool indentificationADAVANCED MICRO DEVICES INC·Filed 2000·Granted May 25, 2004·31 cites·36 claims
- 1686US6687561B1Method and apparatus for determining a sampling plan based on defectivityADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 3, 2004·40 cites·35 claims
- 1785US6821792B1Method and apparatus for determining a sampling plan based on process and equipment state informationADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 23, 2004·32 cites·34 claims
- 1885US6810296B2Correlating an inline parameter to a device operation parameterADVANCED MICRO DEVICES INC·Filed 2002·Granted Oct 26, 2004·42 cites·30 claims
- 1985US6665623B1Method and apparatus for optimizing downstream uniformityADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 16, 2003·29 cites·17 claims
- 2085US6535774B1Incorporation of critical dimension measurements as disturbances to lithography overlay run to run controllerADVANCED MICRO DEVICES INC·Filed 1999·Granted Mar 18, 2003·68 cites·26 claims
- 2182US7103439B1Method and apparatus for initializing tool controllers based on tool event dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 5, 2006·19 cites·28 claims
- 2282US6745086B1Method and apparatus for determining control actions incorporating defectivity effectsADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 1, 2004·25 cites·38 claims
- 2382US6737208B1Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay informationADVANCED MICRO DEVICES INC·Filed 2001·Granted May 18, 2004·14 cites·18 claims
- 2481US6615098B1Method and apparatus for controlling a tool using a baseline control scriptADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 2, 2003·30 cites·34 claims
- 2580US6937914B1Method and apparatus for controlling process target values based on manufacturing metricsADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 30, 2005·16 cites·48 claims
- 2680US6815232B2Method and apparatus for overlay control using multiple targetsADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 9, 2004·27 cites·24 claims
- 2780US6605479B1Method of using damaged areas of a wafer for process qualifications and experiments, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 12, 2003·22 cites·27 claims
- 2880US6528331B1Method for identifying and controlling impact of ambient conditions on photolithography processesADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 4, 2003·19 cites·10 claims
- 2979US6978189B1Matching data related to multiple metrology toolsADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 20, 2005·21 cites·34 claims
- 3079US6871114B1Updating process controller based upon fault detection analysisFiled 2002·Granted Mar 22, 2005·25 cites·37 claims
- 3179US6698009B1Method and apparatus for modeling of batch dynamics based upon integrated metrologyADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 24, 2004·26 cites·21 claims
- 3278US7299154B1Method and apparatus for fast disturbance detection and classificationADVANCED MICRO DEVICES INC·Filed 2005·Granted Nov 20, 2007·10 cites·25 claims
- 3378US6785586B1Method and apparatus for adaptively scheduling tool maintenanceADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 31, 2004·23 cites·23 claims
- 3478US6756243B2Method and apparatus for cascade control using integrated metrologyADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 29, 2004·25 cites·24 claims
- 3578US6732007B1Method and apparatus for implementing dynamic qualification recipesADVANCED MICRO DEVICES INC·Filed 2002·Granted May 4, 2004·19 cites·19 claims
- 3678US6699727B1Method for prioritizing production lots based on grade estimates and output requirementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 2, 2004·21 cites·26 claims
- 3777US6957120B1Multi-level process data representationADVANCED MICRO DEVICES INC·Filed 2003·Granted Oct 18, 2005·20 cites·38 claims
- 3873US6622061B1Method and apparatus for run-to-run controlling of overlay registrationADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 16, 2003·13 cites·31 claims
- 3972US7020535B1Method and apparatus for providing excitation for a process controllerADVANCED MICRO DEVICES INC·Filed 2003·Granted Mar 28, 2006·16 cites·30 claims
- 4072US6576385B2Method of varying stepper exposure dose to compensate for across-wafer variations in photoresist thicknessADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 10, 2003·11 cites·43 claims
- 4171US6675058B1Method and apparatus for controlling the flow of wafers through a process flowADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 6, 2004·14 cites·19 claims
- 4270US8615314B1Process control using analysis of an upstream processSONDERMAN THOMAS J·Filed 2004·Granted Dec 24, 2013·11 cites·47 claims
- 4370US6823231B1Tuning of a process control based upon layer dependenciesADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 23, 2004·12 cites·27 claims
- 4470US6607926B1Method and apparatus for performing run-to-run control in a batch manufacturing environmentADVANCED MICRO DEVICES INC·Filed 1999·Granted Aug 19, 2003·36 cites·27 claims
- 4569US6801817B1Method and apparatus for integrating multiple process controllersADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 5, 2004·14 cites·58 claims
- 4669US6788988B1Method and apparatus using integrated metrology data for pre-process and post-process controlADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 7, 2004·12 cites·34 claims
- 4768US6901340B1Method and apparatus for distinguishing between sources of process variationADVANCED MICRO DEVICES INC·Filed 2001·Granted May 31, 2005·11 cites·29 claims
- 4867US6912436B1Prioritizing an application of correction in a multi-input control systemADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 28, 2005·12 cites·37 claims
- 4964US6970757B1Method and apparatus for updating control state variables of a process control model based on rework dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 29, 2005·10 cites·45 claims
- 5064US6897075B2Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay informationADVANCED MICRO DEVICES INC·Filed 2004·Granted May 24, 2005·4 cites·17 claims
Showing the top 50 of 67 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →