Inventor · disambiguated record
Charles A. Boitnott
Also filed as: BOITNOTT CHARLES · BOITNOTT CHARLES A
8 granted patents·1,649 citations·filing 1989–1997
92Inventor score
Top patents by PatentIndex Score
8 records- 0196US5667592AProcess chamber sleeve with ring seals for isolating individual process modules in a common clusterGASONICS INTERNATIONAL·Filed 1996·Granted Sep 16, 1997·638 cites·8 claims
- 0295US5167716AMethod and apparatus for batch processing a semiconductor waferGASONICS INC·Filed 1990·Granted Dec 1, 1992·620 cites·25 claims
- 0389US5863170AModular process systemGASONICS INTERNATIONAL·Filed 1996·Granted Jan 26, 1999·129 cites·7 claims
- 0487US5855465ASemiconductor wafer processing carouselGASONICS INTERNATIONAL·Filed 1996·Granted Jan 5, 1999·110 cites·6 claims
- 0586US5914278ABackside etch process chamber and methodGASONICS INTERNATIONAL·Filed 1997·Granted Jun 22, 1999·84 cites·11 claims
- 0684US5167717AApparatus and method for processing a semiconductor waferBOITNOTT CHARLES·Filed 1989·Granted Dec 1, 1992·35 cites·21 claims
- 0772US5814154AShort-coupled-path extender for plasma sourceGASONICS INTERNATIONAL·Filed 1997·Granted Sep 29, 1998·26 cites·8 claims
- 0846US5314846AMethod for processing a semiconductor waferATOMEL PRODUCTS CORP·Filed 1992·Granted May 24, 1994·7 cites·9 claims
Join the waitlist — get patent alerts
Get an alert when Charles A. Boitnott files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →