Inventor · disambiguated record

Chulsoo Byun

Also filed as: BYUN CHULSOO

3 granted patents·515 citations·filing 2002–2010

74Inventor score

Technology areasC23C

Files withBYUN CHULSOO3

Top patents by PatentIndex Score

3 records

0194US9315897B2Showerhead for film depositing vacuum equipmentBYUN CHULSOO·Filed 2010·Granted Apr 19, 2016·492 cites·6 claims
0278US7156921B2Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rateBYUN CHULSOO·Filed 2002·Granted Jan 2, 2007·23 cites·1 claims
0356US7485339B2Method for chemical vapor deposition capable of preventing contamination and enhancing film growth rateBYUN CHULSOO·Filed 2006·Granted Feb 3, 2009·0 cites·7 claims

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