Inventor · disambiguated record
Chun Wang Chan
Also filed as: CHAN CHUN WANG
5 granted patents·4 citations·filing 2019–2021
65Inventor score
Technology areasH10P
Files withENTEGRIS INC5
Top patents by PatentIndex Score
5 records- 0189US11837492B2Electrostatic chuck having a gas flow feature, and related methodsENTEGRIS INC·Filed 2021·Granted Dec 5, 2023·2 cites·19 claims
- 0287US11309207B2Grounding mechanism for multi-layer for electrostatic chuck, and related methodsENTEGRIS INC·Filed 2020·Granted Apr 19, 2022·2 cites·11 claims
- 0360US11612972B2Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methodsENTEGRIS INC·Filed 2021·Granted Mar 28, 2023·0 cites·20 claims
- 0456US11417557B2Spiraling polyphase electrodes for electrostatic chuckENTEGRIS INC·Filed 2020·Granted Aug 16, 2022·0 cites·20 claims
- 0543US11742781B2Electrostatic chuck with charge dissipation coatingENTEGRIS INC·Filed 2019·Granted Aug 29, 2023·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →