Inventor · disambiguated record
Chao Chang
Also filed as: CHANG CHAO · CHANG CHAO-CHE
3 granted patents·3 pending applications·0 citations·filing 2020–2025
39Inventor score
Top patents by PatentIndex Score
6 records- 0163US2025052666A1Dual frequency comb imaging spectroscopic ellipsometerKLA CORP·Filed 2024·Application pending·0 cites
- 0258US2025305950A1Combined Ellipsometry and ScatterometryKLA CORP·Filed 2025·Application pending·0 cites
- 0353US11557462B2Collecting and recycling rare gases in semiconductor processing equipmentKLA CORP·Filed 2020·Granted Jan 17, 2023·0 cites·20 claims
- 0448US11259394B2Laser produced plasma illuminator with liquid sheet jet targetKLA CORP·Filed 2020·Granted Feb 22, 2022·0 cites·23 claims
- 0541US11272607B2Laser produced plasma illuminator with low atomic number cryogenic targetKLA CORP·Filed 2020·Granted Mar 8, 2022·0 cites·23 claims
- 0637US2021382216A1Retardation film, a circular polarizer and an electroluminescent display comprising the sameBENQ MATERIALS CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →